EXT250M Turbomolecular Pump
9
11 kg (DN100CF)/8.5 kg (DN100ISO-K)
DN100CF/DN100ISO-K
DN25NW
1
/
8
-inch BSP female
NW10
240 l s
-1
250 l s
-1
190 l s
-1
>1 x 10
8
2 x 10
4
1500
<5 x 10
-10
mbar, <5 x 10
-8
Pa (CF)
<5 x 10
-9
mbar, <5 x 10
-7
Pa (ISO-K)
4.5 m
3
h
-1
2 x 10
-1
mbar, 20 Pa
2 x 10
-1
mbar, 20 Pa
5 x 10
-2
mbar, 5 Pa
E2M5
Any orientation
60000 r min
-1
42000 r min
-1
90 sec
1 min/11 min
Free convection/forced air/water
0 - 35
o
C
0 - 40
o
C
5 - 30
o
C
15 l h
-1
< 50 dBA
2 bar gauge (3 x 10
5
Pa)
EXC300M
480 VA
15 W
‡
Pumping speeds are without inlet-screen. Inlet-screens (supplied fitted) reduce speed by approximately 10%.
*
Ultimate pressure 48 hours after bakeout with 2-stage rotary vane backing-pump.
§
Above this pressure, rotational speed drops below nominal.
✝
A larger backing-pump may be required for maximum throughput.
❏
The braking time (to below 10% of normal speed) without venting will be reduced if the EXC300M
Controller provides the electrical supply for an air-cooler or a vent-valve
Table 2 - EXT250M technical data
Mass
Inlet-flange
Outlet-flange
Vent-port
Purge-flange
Pumping speed
N
2
‡
He
‡
H
2
‡
Compression ratio N
2
He
H
2
Ultimate pressure
*
Minimum backing-pump displacement
Maximum continuous inlet pressure (water cooling at 15
o
C)
§
Maximum continuous inlet pressure (air cooling at 35
o
C)
§
Maximum continuous inlet pressure (free convection at 35
o
C)
§
Recommended backing-pump
✝
Operating attitude
Nominal rotational speed
Standby rotational speed
Starting time to 90% speed
Braking time with/without venting
❏
Cooling method
Ambient air temperature
Free convection
Forced air (flow rate > 70 m
3
h
-1
, 40 cfm)
Water temperature
Required minimum water flow (at 15
o
C)
Noise level (at 1 metre)
Maximum overpressure
Recommended controller
Apparent power input
Quiescent electrical power consumption
