BOC Edwards B735-01-000, Instruction Manual

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CONTENTS
Section Title Page
1 INTRODUCTION 1
1.1 Scope and definitions 1
1.2 General description 2
1.3 Vent options and vent control 4
1.4 Safety bearings 4
2 TECHNICAL DATA 6
2.1 General 6
2.2 Pumping media 6
2.2.1 EXT250M without gas purge 6
2.2.2 EXT250M with gas purge 7
2.3 Vent gas specification and vent control data 7
2.4 Purge gas specification 7
2.5 Cooling-water 8
3 INSTALLATION 11
3.1 Unpack and inspect 11
3.2 Typical installation 11
3.2.1 General 11
3.2.2 Protection of the safety bearings 13
3.3 Connect the EXT250M to your vacuum system 13
3.3.1 Inlet-screen 13
3.3.2 Mechanical fixing 14
3.3.3 Base mounting 14
3.3.4 Inlet connection 15
3.3.5 Backing connection 15
3.4 Vent-valve connection and control 16
3.4.1 Vent configurations 16
3.4.2 Remove and replace the vent-port VRX vent-restrictor 18
3.5 Purge gas connection 18
3.5.1 Remove and replace the purge-port VRX vent-restrictor
(if necessary)
18
3.5.2 Connect the purge gas 18
3.6 Electrical installation 19
3.7 Cooling 19
3.7.1 Water-cooling 20
3.7.2 Forced-air cooling 21
4 OPERATION 22
4.1 Start-up 22
4.2 Standby 23
4.3 Shut-down 23
4.4 Safety interlocks and control-system 24
4.5 Emergency operation : loss of magnetic suspension 24
4.5.1 General 24
4.5.2 Emergency shutdown 24
4.5.3 Excessive vibration 24
EXT250M Turbomolecular Pump i
Ipsitech
8204(B)
-
2005