5.4
Clean the pump
WARNING
Clean the external surfaces of the EXT pump in a well-ventilated location. When you use
cleaning solutions and solvents to clean the pump, observe all precautions specified by the
manufacturer. Avoid inhalation of any particulates which may be present in the pump.
CAUTION
Do not attempt to clean any parts of the EXT pump other than the external surfaces.
Organic solvents may damage internal pump components. Do not use abrasive materials
to clean any part of the pump.
If the inside of the EXT pump is contaminated, it may not be possible to achieve the specified
ultimate vacuum, or pump-down time may increase. In these circumstances, you should return
the pump to a BOC Edwards Service Centre, where the pump will be dismantled and cleaned.
Use the procedure given in the forms at the end of this manual to return the pump.
You can use any organic solvent to clean the external surfaces of the EXT pump. We recommend
that you use non-CFC solvents, such as isopropanol or ethanol. Use a cleaning solution which is
suitable for the contaminants on the pump surfaces.
For environmental reasons, keep wastage of cleaning solutions and solvents to a minimum.
EXT250M Turbomolecular Pump
27
