Symptom
Check
Action
The EXT250M is very
noisy or there is excessive
vibration or both.
Is the pump rotational speed
the same as the resonant
frequency of the attached
system ?
If so, change the natural
frequency of your system or
isolate the pump with flexible
bellows.
Is the vibration being
transmitted from the rotary
pump ?
If so, fit flexible bellows or a
vibration isolator in the backing
line.
Is the EXT250M making a
constant high-pitched noise ?
If so, the rotor is out of balance.
Consult your supplier or your
nearest BOC Edwards company.
None of the above
-
Contact your supplier or your
nearest BOC Edwards company.
Table 7 - Fault finding (continued)
EXT250M Turbomolecular Pump
31
