3
INSTALLATION
WARNING
Safely route all vacuum, vent/purge gas and cooling-water pipelines, and all electrical
cables and wires, so that people cannot trip over them.
3.1
Unpack and inspect
The pump is packed to prevent damage in transit. Take care when you unpack the pump to avoid
excessive shocks which could damage the bearings and reduce the life of the pump. The pump is
supplied with the inlet and outlet sealed to prevent entry of dust and vapour. Do not remove
these seals until you are ready to install the pump on your vacuum system.
Remove all packing materials and check the pump. If the pump is damaged, notify your supplier
and the carrier in writing within three days; state the Item Number of the pump together with
your order number and your supplier’s invoice number. Retain all packing materials for
inspection. Do not use the pump if it is damaged.
Check that your package contains the items listed in Table 3 below. If any of these items is
missing, notify your supplier in writing within three days.
If the pump is not to be used immediately, store the pump in suitable conditions as described in
Section 6.1.
Do not discard the packing materials; retain them to repack the pump when you return it for
service.
Qty
Description
Check (
✓
)
1
EXT250M Turbomolecular Pump
❏
1
Trapped ‘O’ ring or compression gasket
❏
1
EXC300M Controller
❏
1
Pump-to-Controller Cable
❏
Table 3 - Checklist of items
3.2
Typical installation
3.2.1
General
A typical pumping system with an EXT250M is shown in Figure 4. Note that the pump-inlet is
connected directly to the vacuum system and that an optional backing-pump isolation-valve is
fitted to the backing-port. This configuration is often used because the EXT250M is oil-free and
may therefore be considered to be part of the high vacuum system.
When necessary, purge the EXT pump with inert gas as described in Section 3.5.
The accessories available for the EXT250M are detailed in Section 7; the accessories are shown in
Figure 6.
EXT250M Turbomolecular Pump
11
