Azbil Micro Flow CMS 0200 User Manual Download Page 1

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Thank you for purchasing an Azbil

Corporation product.
This manual contains information

for ensuring the correct use of this

product. It also provides necessary

information for installation, main-

tenance, and troubleshooting.
This manual should be read by

those who design and maintain

equipment that uses this product.

Be sure to keep this manual nearby

for handy reference.

Gas Mass Flow Meter

SUS/SUS316 Models

CMS9500/0002/0005/

0020/0050/0200/0500

User's Manual

No. CP-SP-1189E

Summary of Contents for Micro Flow CMS 0200

Page 1: ...o provides necessary information for installation main tenance and troubleshooting This manual should be read by those who design and maintain equipment that uses this product Be sure to keep this man...

Page 2: ...tion and specifications in this manual are subject to change without notice Considerable effort has been made to ensure that this manual is free from inaccuracies and omissions If you should find an e...

Page 3: ...should pay attention to when handling the Gas Mass Flow Meter Note Notes indicate information that might benefit the user This indicates the item or page that the user is requested to refer to 1 2 3 N...

Page 4: ...e valve or the like to control the flow rate If the flow rate exceeds the high limit both the flow rate display and the output voltage current may indicate considerably lower values than the actual fl...

Page 5: ...r or the device could slip and fall causing an injury Mount this device horizontally If it is mounted vertically drift may occur when the flow rate is zero resulting in an erroneous measurement Do not...

Page 6: ...l is supplied with the product Personnel in charge of the design or configuration of equipment that incorporates this device should read this manual thoroughly The manual covers safety precautions ins...

Page 7: ...er 11 Wiring 13 Chapter 4 Operation State transition 16 Function setup 17 Parameter setup 21 Display OFF mode 24 Totalized flow and reverse totalized flow 24 Memory backup for totalized flow and rever...

Page 8: ......

Page 9: ...e not affected by temperature or pressure Provides high accuracy 3 rdg and high rangeability 100 1 Model Measurement range CMS9500 5 500 mL min standard CMS0002 0 02 2 L min standard CMS0005 0 05 5 L...

Page 10: ...report Y With traceability certificate 0 Product version 1 mL m in standard and L min standard indicate the volumetric flow rate per minute converted to conditions of 20 C and 101 325 kPa 1 atm The re...

Page 11: ...ions 0 No degreasing 1 Degreasing for gas contacting parts 5 0 No optional functions D With inspection report Y With traceability certificate 0 Product version 1 mL m in standard and L min standard in...

Page 12: ...For communication models 5 m harness 10 core with M3 5 spade terminals Mounting bracket 81446628 001 For CMS9500 0002 0005 0020 0050 81446721 001 For CMS0200 81446856 001 For CMS0500 AC adapter 814469...

Page 13: ...nt LED During setup the first two digits and the last two digits show the function and the setting respectively EV1 and EV2 indicators Lit when event output is generated Display unit Instantaneous flo...

Page 14: ...loss or damage could result from the abnormal functioning of this device include appropri ate redundancy in the system design Prevent foreign matter from entering this device If rust water droplets o...

Page 15: ...ductive sub stances water droplets oil mist or organic solvents Direct vibration or shock Direct sunlight Water or rain Splashing by fluids e g oil chemicals Strong magnetic or electrical field Behavi...

Page 16: ...s 1 and 2 make sure that there are no welding fumes and dust before installation Handling Precautions If foreign matter cannot be fully eliminated by flushing or wiping or if the regular presence of f...

Page 17: ...CMS CMS 5D B B B 5D 3D 3D A A B A A CMS CMS Upstream reduction Downstream expansion Different diameter socket etc Different diameter socket etc If the flowmeter and the pipe have the same internal di...

Page 18: ...g hold the flowmeter by putting a wrench on the flange Handling Precautions Do not grip and turn the main part of the device Doing so might cause damage or leakage When connecting the pip ing do not h...

Page 19: ...ause measurement error or device failure z z Mounting orientation z z Installation There are two methods of mounting the flowmeter 1 Attach the flowmeter using the mounting screw holes on the bot tom...

Page 20: ...with four screws from the top of the bracket Mounting bracket model number 81446628 001 For CMS9500 0002 0005 0020 0050 81446721 001 For CMS0200 81446856 001 For CMS0500 Mounting bracket 63 78 4 5 48...

Page 21: ...ring can cause damage or malfunction For wiring it is recommended to use a harness with the dedicated connector sold separately z z Connector pin layout Compatible connector DF11 10DS 2C made by Hiros...

Page 22: ...aneous flow rate output and event output common lines are all connected inside this device If these lines are connected to an external device through a common power supply interference will cause devi...

Page 23: ...ed flow data Example The instantaneous flow rate is 100 L min standard and the totalized flow is 100 x 10 L Communication specifications Item Description Communication system RS 232C start stop synchr...

Page 24: ...ayed If the DISP key is pressed again the first 4 digits of the totalized flow or reverse totalized flow are displayed Pressing the key once more restores the instantaneous flow rate display If at som...

Page 25: ...o 12 2 When the first two digits display the desired setup item press the ENT key while the digits are blinking The setup item is selected and the last two digits will begin blinking Press the or key...

Page 26: ...count Reverse totalized flow countdown Totalizer output pulse rate 1 1 Totalizer output pulse rate 2 1 Totalizer output pulse rate 3 1 00 05 On delay EV1 00 0 1 Disable Enable 00 Valid only if functi...

Page 27: ...nparity 1stopbit 8 bit data no parity 2 stop bits 00 Can be set only for models with RS 485 1 Totalizer output pulse rates Function setup Function Setting CMS9500 CMS0002 0005 CMS0020 0050 CMS0200 050...

Page 28: ...n 0 and 2 5 V In addition if function setup 0G analog output scaling is changed the analog output changes to 0 5 V for the specified flow rate range Any desired flow rate range from 10 to 250 can be s...

Page 29: ...en the desired item No is displayed The current parameter will be displayed If the ENT key is pressed again the last digit will begin blinking Pressing the MODE key moves the blinking digit to the lef...

Page 30: ...or 1 000 0 100 to 8 000 If 08 is set to 08 P 0G Analog output scaling 100 10 to 250 If 0G is set to 04 z z CMS0002 0005 Parameter Item Default setting Setting range Condition for display setting in fu...

Page 31: ...vent output 2 EV2 0 0 to 9999 L min 1 If 04 is set to 0 1 or 02 00000000 0 to 99999999 10L If 04 is set to 03 or 04 P 03 EV1 hysteresis 50 2 0 to 100 L min 2 If 03 is set to 0 1 or 02 P 04 EV2 hystere...

Page 32: ...d flow are reset 10 minutes have passed after the last time the data was saved How to reset the totalized flow and reverse totalized flow To reset press the and keys simultaneously for at least one se...

Page 33: ...calibration as shown below 1 Display the instantaneous flow rate or totalized flow 2 Press and hold the ENT key 3 After about 10 seconds 0 CAL will begin blinking on the flow rate display 4 Press and...

Page 34: ...orrect Check for gas leaks from the piping Check if there is a foreign substance such as dust or oil in the pipe or the connection port of the flowmeter If oil is found contact the azbil Group and ask...

Page 35: ...27 MEMO...

Page 36: ...mL min 3 rdg 1 digit 0 02 0 4 L min 1 FS 1 digit 0 4 2 L min 3 rdg 1 digit 0 05 1 L min 1 FS 1 digit 1 5 L min 3 rdg 1 digit Temperature characteristics at 10 to 60 C 6 0 to 75 of flow rate range 0 10...

Page 37: ...min 1 FS 1 digit 2 20 L min 3 rdg 1 digit 0 5 5 L min 1 FS 1 digit 5 50 L min 3 rdg 1 digit 2 20 L min 1 FS 1 digit 20 200 L min 3 rdg 1 digit 5 50 L min 1 FS 1 digit 50 500 L min 3 rdg 1 digit 0 to 7...

Page 38: ...al current contacts ON approx 0 5 mA current to contacts Allowable ON contact resistance 250 max Allowable OFF contact resistance 100 k min Allowable ON residual voltage 0 8 V max for open collector A...

Page 39: ...on voltage contacts or open collector Terminal voltage contacts OFF 4 5 1 V Terminal current contacts ON approx 0 5 mA current to contacts Allowable ON contact resistance 250 Allowable OFF contact res...

Page 40: ...ide CO2 250 2 5 1 1 2 5 0 01 Oxygen 2 500 5 1 2 5 0 01 Fuel gas 13A 400 4 1 1 5 3 75 0 01 Methane 500 5 1 2 5 0 01 Propane 140 1 4 1 0 5 1 25 0 005 Butane 100 1 1 0 4 1 0 005 User specified 1 5 1 1 5...

Page 41: ...n Air nitrogen 500 5 1 Argon 500 5 1 Carbon dioxide CO2 250 2 5 1 Oxygen 2 500 5 1 Fuel gas 13A 400 4 1 Methane 500 5 1 Propane 140 1 4 1 Butane 120 1 2 1 User specified 1 5 1 1 Users can set the conv...

Page 42: ...tely Harness with dedicated connector model No 81446594 ITEM Mounting bracket model No 81446721 001 Connector DF11 10DP 2DS made by Hirose Electric Co Ltd Connection threads Rc 1 4 2 Harness with dedi...

Page 43: ...l Corporation X10L L min EV2 EV1 ENT MODE DISP Mass Flow Meter MADE IN JAPAN Azbil Corporation MADE IN JAPAN Azbil Corporation 15 0 3 37 32 17 15 7 15 7 91 69 1 7 5 48 7 18 5 2 9 16 18UNF 58 75 48 58...

Page 44: ...46721 001 2 3 4 16 UNF 90 78 75 63 4 5 98 6 18 7 18 7 82 1 23 2 45 62 50 7 5 HEX26 148 6 25 25 160 30 7 30 7 HEX7 8 25 3 13 5 161 6 31 5 31 5 48 0 3 M4 threaded holes 4 6 mm deep for retaining screws...

Page 45: ...fittings 2 SS 8 VCR 1 8STSC11 or equivalent Material SUS316 Connector DF11 10DP 2DS made by Hirose Electric Co Ltd Rc 1 2 fittings 2 Compatible pipe Outer diameter 1 2 Material SUS316 1 2 Swagelok fi...

Page 46: ...connection harness is necessary when supplying AC power to the CMS z z 81446594 030 AC adapter connection harness ITEM 005 006 ITEM 007 008 81446957 001 Azbil Corporation 50 26 5 64 1800 50 2 3 0 20...

Page 47: ...ing bracket 81446856 001 for CMS0500 Material SUS304 Unit mm 2 4 5 d ia ho le R 2 R 1 o r C 1 3 2 B 2 places R 4 5 5 5 A 4 places 58 5 48 11 11 75 6 5 36 10 3 6 68 58 13 5 48 24 16 5 15 B A Mounting h...

Page 48: ...Butane 2 08 Example For the CMS9500 if the primary pressure is 100 kPa and the flow rate is 500 mL min the pressure loss for argon is calculated as follows On the graph for CMS9500 the pressure loss i...

Page 49: ...min standard Pressure loss Pa CMS0002 Primary pressure 0 5 kPa 100 kPa 300 kPa 500 kPa 700 kPa 20 0 40 0 60 0 80 0 100 0 120 0 140 0 160 0 180 0 0 0 0 2 4 6 1 3 5 Flow rate L min standard Pressure los...

Page 50: ...0 0 700 0 800 0 0 100 0 0 0 100 200 50 150 250 Flow rate L min standard Pressure loss Pa CMS0200 500 0 1000 0 1500 0 2000 0 2500 0 0 0 0 200 400 100 300 500 600 Flow rate L min standard Pressure loss...

Page 51: ...added CMS Series flowmeter was changed to Gas Mass Flow Meter Caution was added Notes was changed CMS was deleted from the figure MFF100 Series was changed to MFF200NAG A description was added to diag...

Page 52: ...1 12 2 Kawana Fujisawa Kanagawa 251 8522 Japan URL https www azbil com 11 Specifications are subject to change without notice 1st edition Dec 2006 U 3rd edittion Oct 2019 V...

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