Azbil Micro Flow CMS 0200, User Manual

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22
Chapter 4. Operation
z
CMS9500
Parameter Item Default setting Setting range
Condition for display (setting
in function setup mode)
P-0 1
Event output 1 (EV1)
0.
0 to 9999 (mL/min) If
03
is set to
0 1
, or
02
.
00000000.
0 to 99999999 (× 10mL) If
03
is set to
03
or
04
.
P-02
Event output 2 (EV2)
0.
0 to 9999 (mL/min) If
04
is set to
0 1
, or
02
.
00000000.
0 to 99999999 (× 10mL) If
04
is set to
03
or
04
.
P-03
EV1 hysteresis
50.
0 to 100 (mL/min) If
03
is set to
0 1
, or
02
.
P-04
EV2 hysteresis
50.
0 to 100 (mL/min) If
04
is set to
0 1
, or
02
.
P-05
EV1 on-delay
0
0 to 60 (s) If
03
is set to
0 1
, or
02
.
P-06
EV2 on-delay
0
0 to 60 (s) If
04
is set to
0 1
, or
02
.
P-07
Initial reverse-totalized flow
00000000.
0 to 99999999 (× 10mL) If
02
is set to
02
.
P-08
Gas type conversion factor
1.000
0.100 to 8.000 If
08
is set to
08
.
P-0G
Analog output scaling
100
10 to 250 (%) If
0G
is set to
04
.
z
CMS0002/0005
Parameter Item Default setting Setting range
Condition for display (setting
in function setup mode)
P-0 1
Event output 1
(EV1)
0.00
0 to 99.99 (L/min)* 1 If
03
is set to
0 1
, or
02
.
00000000.
0 to 99999999 (L) If
03
is set to
03
or
04
.
P-02
Event output 2
(EV2)
0.00
0 to 99.99 (L/min)* 1 If
04
is set to
0 1
, or
02
.
00000000.
0 to 99999999 (L) If
04
is set to
03
or
04
.
P-03
EV1 hysteresis
0.50
* 2 0 to 1.00 (L/min)* 2 If
03
is set to
0 1
, or
02
.
P-04
EV2 hysteresis
0.50
*
2
0 to 1.00 (L/min)*
2
If
04
is set to
0 1
, or
02
.
P-05
EV1 on-delay
0
0 to 60 (s) If
03
is set to
0 1
, or
02
.
P-06
EV2 on-delay
0
0 to 60 (s) If
04
is set to
0 1
, or
02
.
P-07
Initial reverse-totalized flow
00000000.
0 to 99999999 (L) If
02
is set to
02
.
P-08
Gas type conversion factor
1.000
0.100 to 8.000 If
08
is set to
08
.
P-0G
Analog output scaling
100
10 to 250 (%) If
0G
is set to
04
.