6
WARNING
When using combustible gas, install the device upstream of the safety shutoff valve. If air somehow
enters the piping, resulting in an explosive mixture, and the sensor makes a spark due to some
cause like a lightning strike, an explosion could occur inside the pipe.
Never allow a gas that is within explosive limits to pass through this device.
Doing so might result in an explosion.
If a model designed for use with oxygen has been used for other gases, do not use it again for
oxygen. Doing so could cause a serious accident.
If a model not designed for use with oxygen has been purchased, do not use it for oxygen.
Doing so could cause a serious accident.
CAUTION
Check the product connections and pipe connections for leakage before use.
Also, check the connections for leakage regularly after the start of use.
It is the user’s responsibility to ensure that gas leaks can be reliably detected. This is especially
important if a dangerous gas is used.
Be sure to use this device within the flow-rate range stipulated in the product specifications.
To prevent excessive flow, use a suitable means to control the supply pressure or use a throttle
valve or the like to control the flow rate. If the flow rate exceeds the high limit, both the flow
rate display and the output voltage/current may indicate considerably lower values than the
actual flow rate.
"Behavior when the flow rate greatly exceeds the measurement range" (page 7)
If loss or damage could result from the abnormal functioning of this device, include appropri-
ate redundancy in the system design.
Prevent foreign matter from entering this device.
If rust, water droplets, oil mist, dust, etc. from the pipes enters the device, measurement error
might occur or this device may be damaged.
If there is a possibility of foreign matter entering the device, install an upstream filter, strainer,
or mist trap capable of eliminating foreign matter 1 µm or greater in diameter. Be sure to
inspect and replace the filter at regular intervals.
If this device is used to monitor gas flow rate to a burner, design pipes and instrumentation so
that backfire will not damage the device.
This device is a precision instrument. Do not drop it or subject it to shock. Doing so might
damage the device.
Do not use this device outside of the operating pressure range. Also, do not subject it to pres-
sure beyond the rated pressure resistance range. Doing so might damage it.
When making the pipe connections, fix the flange section of the pipe connector port in place,
and turn the pipe to tighten.
When installing, fasten firmly to prevent vibration.
If using Rc connections, take care not to coat with too much sealant. Foreign matter or burrs in
the pipes may cause measurement error.
Before connecting pipes with Swagelok or VCR connections, check the instructions in the
manual provided by the fitting manufacturer.
When purchasing a fitting, use the following or an equivalent:
1/4 Swagelok:
SS-400-1-6STSC11
1/2 Swagelok:
SS-810-1-8STSC11
1/4 VCR:
SS-4-VCR-1-00032SC11
1/2 VCR:
SS-8-VCR-1-8STSC11, or equivalent.
Chapter 3. Mounting and Wiring
Summary of Contents for Micro Flow CMS 0200
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