Table 3-16:
Rotary Encoder Specifications for PRO225SL/SLE Stages
Encoder Option
Fundamental Signal
Period
Digital Resolution
-M1, -M2, -M5, -M6
(2500 line TTL signal)
2 µm
0.5 µm
-M3, -M4, -M7, -M8
(1000 line 1Vpp Amplified Sine signal)
5 µm
--
-M3, -M4, -M7, -M8 with 1000x Interpolation
(1)
(1000 line 1Vpp Amplified Sine signal)
5 µm
5 nm
-M3, -M4, -M7, -M8 with 4000x Interpolation
(1)
(1000 line 1Vpp Amplified Sine signal)
5 µm
1.25 nm
1. Quadrature decoding included in interpolated resolution calculations
Table 3-17:
Linear Encoder Specifications for PRO225SL/SLEE Stages
Encoder Option
Fundamental Signal
Period
Digital Resolution
-E1
20 µm
--
-E1 with x4000 Interpolation
(1)
20 µm
5 nm
-E1 with x16000 Interpolation
(1)
20 µm
1.25 nm
-E2
20 µm
100 nm
-E3
--
1 nm
-E4
20 µm
0.5 µm
1. Quadrature decoding included in interpolated resolution calculations
PRO225SL/SLE Hardware Manual
3.3. Motor and Feedback Specifications
www.aerotech.com
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