Aerotech PRO22SL, Hardware Manual

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Table 1-4: PRO225SL/SLE Series Specifications (-0400 to -1000)
-0400 -0500 -0600 -0800 -1000
Travel 400 mm 500 mm 600 mm 800 mm 1000 mm
Accuracy
(1)
SL
Standard ±11 µm ±13 µm ±15 µm ±17 µm ±18 µm
Calibrated ±1.5 µm ±2 µm ±2 µm ±2.5 µm ±3 µm
SLE
Standard ±12 µm ±14 µm ±15.5 µm ±17 µm ±18 µm
Calibrated ±1 µm ±1.5 µm ±1.5 µm ±1.5 µm ±1.5 µm
Resolution
(Minimum
Incremental
Motion)
SL
0.1 µm
(2)
, 1.0 µm
(3)
SLE
0.05 µm (-E1/-E3 encoder), 0.2 µm (-E2 encoder), 1.0 µm (-E4
encoder)
Bidirectional
Repeatability
(1)
SL ±1 µm
SLE ±0.5 µm ±0.5 µm ±0.5 µm ±0.75 µm ±0.75 µm
Horizontal Straightness
(1)
±4.5 µm ±5.5 µm ±6.5 µm ±8 µm ±9.5 µm
Vertical Straightness
(1)
±4.5 µm ±5.5 µm ±6.5 µm ±8 µm ±9.5 µm
Pitch
60 µrad
(12.4
arc·sec)
70 µrad
(14.4
arc·sec)
80 µrad
(16.5
arc·sec)
90 µrad
(18.6
arc·sec)
110 µrad
(22.7
arc·sec)
Roll
60 µrad
(12.4
arc·sec)
70 µrad
(14.4
arc·sec)
80 µrad
(16.5
arc·sec)
90 µrad
(18.6
arc·sec)
110 µrad
(22.7
arc·sec)
Yaw
60 µrad
(12.4
arc·sec)
70 µrad
(14.4
arc·sec)
80 µrad
(16.5
arc·sec)
90 µrad
(18.6
arc·sec)
110 µrad
(22.7
arc·sec)
Maximum Speed
(4)
220 mm/s 220 mm/s 220 mm/s 220 mm/s 140 mm/s
Maximum Acceleration
(4)
Function of motor, amplifier, payload, and maximum axial load
Load Capacity
(5)
Horizontal 100 kg
Vertical (Axial) 60 kg
Side 100 kg
Moving Mass
(with tabletop)
SL 7.3 kg
SLE 7.5 kg
Stage Mass
(no motor) SL 26.9 kg 29.2 kg 31.5 kg 36.2 kg 40.9 kg
SLE 27.8 kg 30.2 kg 32.6 kg 37.5 kg 42.3 kg
Material Anodized Aluminum
Mean Time Before Failure (MTBF) 20,000 Hours
1. Certified with -PL1 and -PL2 option.
2. Achieved with Aerotech rotary motor with amplified sine encoder.
3. Achieved with Aerotech rotary motor with 2500 counts/rev digital encoder.
4. Requires the selection of an applicable amplifier with sufficient voltage and current.
5. Axis orientation for on-axis loading is listed.
6. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is
payload and workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications.
7. Specifications listed are non-foldback kit options. Contact the factory for specifications when a foldback kit (-FBx) is
used.
PRO225SL/SLE Hardware Manual 1.3. Basic Specifications
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