TSic LABkit™ User Manual and Technical Description
TSic
TM
LABkit, Rev.2.4, Oct. 18, 2005
Page 16 of 18
© ZMD AG & IST AG, 2005
All rights reserved. The material contained herein may not be reproduced, adapted, merged, translated, stored, or used without the prior
written consent of the copyright owner.
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Example 1
– Processing of surface temperature measurement data for a metal surface.
This example shows the inhomogeneous temperature behavior of a continuously heated metal surface.
Figure 8.4
– Metal Surface Measurement Data Chart
Example 2
– Processing of surface temperature measurement for four different points on a wafer.
In this example, the temperature was continuously heated from 26°C to 80°C.
Figure 8.5
–
Excerpt of Surface Temperature Measurement of 4 Different Points on a Wafer
