30
Operation Method
Vacuumizing and air intake
Exhaust speed regulating
valve
I nt ake Speed
Max
Mi n
Intake speed regulating
valve
Vacuumizing:
1
）
Turn the intake speed regulating valve CW to its end (close);
2
）
Turn the exhaust speed regulating valve CCW to its end, the
exhaust speed is max. here;
3
）
Turn on vacuum pump for vacuumizing.
Air intake:
1) Turn the exhaust speed regulating valve CW to its end (close);
2) Turn off vacuum pump;
3) Slowly turn the intake speed regulating valve CCW to its end,
the intake speed is max. here;
4) The door of chamber is unable to be opened when the inside
pressure resumed to atmosphere pressure.
The operation procedures must be strictly followed
.
exhaust Speed
Max
Min
