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Aquarius DIW Heaters Owner’s Manual
Ver. 1.0.0 | 29 Apr 2020 | P. 3
Subject to change without notice
1.
Emergency Off (EMO) button
- An EMO button located on the front of the unit (and
remotely if option is selected) is utilized by the user in the event of an emergency
condition to shut power to the unit (and other devices if option is selected). It is a SEMI
S2 compliant device with a direct opening action mechanism, and safe break action.
2.
Door Interlock Switch
- A door interlock switch mounted to the front cabinet door is
used to indicate if the door is open or closed. If the front door is open, the power will be
cut to the unit. This safety device features force guided contacts and a tamper resistant
mechanism.
3.
Safety Relay
– The Safety Relay monitors both the EMO button and the Door
Interlock Switch. The Safety Relay incorporates redundant relays in conjunction with
the emergency off button switch and the safety open-door interlock to achieve safety
category 3. The Safety Relay determines whether or not to provide power to the unit.
4.
Ground Fault Circuit Interrupter (GFCI)
– GFCI monitors heater amperage and any
circuits containing 120 volts or more if a suspicious current leak is detected in circuitry.
5.
Thermal Cut-Off Sensor
– The thermal cut-off sensor is a thermal sensor which opens
once it’s breaking temperature is exceeded. It is used to shut down the heater when a
runaway heating condition occurs.
6.
Safety PLC (Programmable Logic Controller)
- Safety PLC monitors high-limit
thermocouples, GFCI, and Thermal Cut-off Sensor status using redundant force guided
relays, and controls the Heater Master Relay (which controls the heater contactor) and
the Heater Safety Relay (which controls the SCR output signals to the heater).
7.
Pressure Relief Valves
– Pressure relief valves are installed at the input and output of
the unit to relieve pressure if it exceeds the pressure relief set value which protects the
plumbing components of the unit and personnel.
8.
Water Leak Deluxe (Optional)
– The water leak deluxe option consists of monitoring
for system leaks via water leak sensor and isolation valves which shut off the incoming
process fluid and the heaters as well. This option allows the user to isolate and reduce
a pressurized system to a zero-energy state prior to maintenance or service work. The
system uses two pneumatically or manually operated 2/2-way diaphragm valves to
isolate the system. The valves are located at the input and output. (Optional).
8.
Lockout/Tagout (Optional)
- Lockout/Tagout is optional for Aquarius
®
systems. It
provides a fusible disconnect switch on the unit and conforms to SEMI S2-0715 to
isolate the unit electrically for maintenance and service. The handle is lockable. If the
lockout/tagout is not included, the main disconnect is customer supplied. (Optional)
We are confident in our product quality and reliability, and we offer technical support.
Our Aquarius
®
systems satisfy all CE and SEMI’S Safety Standards and they are equipped
with safety devices to protect the users as well as the products that they are processing.
These safety devices include:
