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VAT 616 Series Скачать руководство пользователя страница 37

Series 616

MAINTENANCE

893179ED.DOCX

Edition 2020-01-22

37/56

7.2.2

Replacement of shaft feed through seals and valve cleaning

7.2.2.1

Required tools

•

Allen Wrench 2mm

•

Allen Wrench 3mm

•

O-ring removal tool
(see chapter Accessories)

•

Isopropyl alcohol

•

Cleanroom wipes

•

Vacuum grease (see chapter spare parts)

Description

Required tool

1. Vent vacuum system on both sides of the valve.

2. Move the plate to position 50% open.

3. Disconnect electrical POWER connector at valve and remove valve from vacuum system.

Take care to the sealing surface!

4. Loosen clamp coupling screw

Allen Wrench:

elastic coupling

2 mm

steel coupling

2.5 mm

5. Unfasten and remove the 3 fastening

screws

Allen Wrench

3mm

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Содержание 616 Series

Страница 1: ...22 Butterfly position control isolation valve with position controller with Logic interface Series 616 DN 40 50mm I D 1 5 2 This manual is valid for the following product ordering numbers 61632 K M1...

Страница 2: ...s duplicated or distributed without written permission from VAT Offenders are liable to pay damages The original VAT firmware and updated state of the art versions of the VAT firmware are intended for...

Страница 3: ...Installation procedure 15 4 3 Tightening torque 15 4 3 1 Mounting with ISO KF flanges 15 4 4 Admissible forces 16 4 4 1 Admissible forces at controller 17 4 5 Electrical connection 18 4 5 1 Ground con...

Страница 4: ...alve cleaning 37 8 Repairs 44 9 Dismounting and Storage 45 9 1 Dismounting 45 9 2 Storage 46 10 Packaging and Transport 47 10 1 Packaging 47 10 2 Transport 48 11 Disposal 49 12 Spare parts 50 12 1 Dra...

Страница 5: ...isolation functionality for downstream pressure control in vacuum systems Use product for clean and dry vacuum applications only Other applications are only allowed with the written permission of VAT...

Страница 6: ...ion control 0 10V Resolution 2 5 mV Digital inputs 2 Input 1 Input 2 open valve close valve adjustable with CPA 4 0 adjustable with CPA 4 0 Digital outputs 2 Output 1 Output 2 valve closed valve open...

Страница 7: ...ed cond Admissible operating temperature Valve body Ambient 10 C to 120 C 10 C to 50 C Mounting position Valve seat must face chamber side Wetted materials Body plate 616 H Aluminum 3 2315 AA6082 hard...

Страница 8: ...ation Operating Maintenance Instructions are an integral part of a comprehensive documentation belonging to a complete technical system They must be stored together with the other documentation and ac...

Страница 9: ...ations WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage Only qualified personnel are allowed to carry out the described work 2 4 Safety labels Label Par...

Страница 10: ...0 56 Edition 2020 01 22 893179ED DOCX 3 Design and Function 3 1 Design Sample picture XY Double excentric bearing prevents wearing of the o ring and particle generation 1 Controller 4 Double seal 2 Co...

Страница 11: ...position to achieve the setpoint pressure Actuation is performed by a stepper motor An encoder monitors the position This principle ensures fast and accurate process pressure control even in demanding...

Страница 12: ...hysical overstraining at pedestal Inappropriate handling with the valve may cause in damage of pedestal Lift valve at valve body out of transport case Make sure that the supplied products are in accor...

Страница 13: ...orrect handling Only qualified personal are allowed to install the valve into the vacuum system NOTICE Wrong connection Wrong connection may result in damage of controller or power supply Connect all...

Страница 14: ...ondition Install the valve with integrated controller with space for dismantling and air circulation as shown in figure below Sample picture 4 2 2 Connection overview System 1 Valve 2 Process chamber...

Страница 15: ...are valve for operation 4 3 Tightening torque 4 3 1 Mounting with ISO KF flanges Tightening torques for ISO KF flange connections depend on the type of seal which is used Follow recommendations of sea...

Страница 16: ...t valve body Forces from the weight of other components can lead to deformation of the valve body and to malfunction of the valve Do not higher force the valve body as specified The following forces a...

Страница 17: ...e pedestal could be permanently damaged Do not pushing shocking load or stressing the valve controller Do not deposit anything at valve controller The admissible force at valve controller in regards t...

Страница 18: ...TICE Burned connector pins spark Connector pins or electronic parts could damage if plugged and unplugged under power Do not plug or unplug connectors under power 4 5 1 Ground connection Recommendatio...

Страница 19: ...SB B allows to connect the valve to a USB A port of a computer This requires a USB A B cable male male The Service port is used for Local operation and setup You can use our Software Control Performan...

Страница 20: ...eans of digital input output and analog input output signals Digital inputs may be operated either by switches or by voltage sources a Configuration with switches for digital inputs VAT fuse recommend...

Страница 21: ...Edition 2020 01 22 21 56 b Configuration with voltage source for digital inputs VAT fuse recommendation a 2 AF Connect all pins exact as shown in the schematics above Use only screws with 4 40UNC thr...

Страница 22: ...is in linear relation to the applied voltage 0V is min conductance position 10V is open position 3 12 Input 1 Digital Input When actuated the valve will be moved to fully open positon 2 13 Input 2 Dig...

Страница 23: ...N output CLOSE output Not inverted Not inverted Open Close Functionality of digital inputs CLOSE VALVE and OPEN VALVE must be selected These may be configured as not inverted or inverted Default is no...

Страница 24: ...carry out the described work WARNING Valve opening Risk of serious injury Human body parts must be kept out of the valve opening and away from moving parts Do not connect the controller to power befo...

Страница 25: ...ve controller SERVICE Refer to chapter Service port connection 2 The window CPA exe opens 3 Click CPA exe 4 The CPA 4 0 opens 5 Click Local for Local operation 6 Do the configuration according to your...

Страница 26: ...for remote operation See section Function and Wiring for details Control Performance Analyzer 4 0 which is integrated in the Controller may be used for monitoring during remote control Control Perform...

Страница 27: ...nd OPEN VALVE 5 4 Position control The valve position is directly controlled according to the position setpoint Local operation Control Performance Analyzer 4 0 Remote operation Refer to chapter Digit...

Страница 28: ...ERROR red ERROR ON OFF OFF ON For ERROR refer to chapter Troubleshooting for details 5 5 4 Service indication not implemented yet 5 6 Operation during power up Valve position before power up Reaction...

Страница 29: ...valve Heated valve may result in minor or moderate injury Do not touch valve and heating device during operation Once heating is switched off valve and system await until the valve is cooled down comp...

Страница 30: ...alve plate mechanically obstructed Serious temperature difference between valve body and valve plate that led to a contact between these due material expansion Resolve obstruction Uniform temperature...

Страница 31: ...alve and system await until the valve is cooled down complete before doing any work NOTICE Contamination Gate and other parts of the valve must be protected from contamination Always wear clean room g...

Страница 32: ...pending on process conditions VAT can give the following recommendations for preventive maintenance Replacement of unheated 1 heated 80 C 1 heated 80 C 1 Rotary feedthrough seals 2 000 000 cycles 6 mo...

Страница 33: ...escription Required tool 1 Vent vacuum system on both sides of the valve 2 Move the plate to position 30 open 3 Disconnect electrical POWER connector at valve and remove valve from vacuum system Atten...

Страница 34: ...ing removal tool 9 Clean the plate and o ring groove Cleanroom wipes soaked with isopropyl alcohol 10 Lubricate the new o ring with 0 0125 ml vacuum grease For new o ring refer to chapter spare parts...

Страница 35: ...4 Push in the o ring equally around the plate into o ring groove 15 Plate with equal mounted o ring 16 Place the plate on the shaft in the valve body 17 Tighten plate screws to block 18 Loosen the pla...

Страница 36: ...ate into sit of valve body close position 20 Disconnect electrical POWER connection Attention Keep fingers out of the valve opening during plate movement 21 Fasten the plate screws with 2 5 Nm 22 If s...

Страница 37: ...lcohol Cleanroom wipes Vacuum grease see chapter spare parts Description Required tool 1 Vent vacuum system on both sides of the valve 2 Move the plate to position 50 open 3 Disconnect electrical POWE...

Страница 38: ...care of position actuating unit to valve unit for reassembling See also dimensional drawing If clamp coupling is separated assemble them at control and actuating unit 7 Unfasten and remove the 2 faste...

Страница 39: ...01 22 39 56 Description Required tool 11 Remove mechanical unit from valve body 12 Clean shaft Cleanroom wipes soaked with isopropyl alcohol 13 Remove both o rings Soft tool 14 Clean shaft feed throu...

Страница 40: ...h a slight film of 0 025 ml vacuum grease Vacuum grease 17 Lubricate seal contact surface of shaft with a slight film of 0 0125 ml vacuum grease Vacuum grease 18 Lubricate each o ring with a slight fi...

Страница 41: ...nit into valve body see picture 23 Fasten and tighten the 2 mounting screws with 2 5 Nm Allen torque wrench 3mm 24 Place the plate on the shaft in the valve body 25 Tighten plate screws to block 26 Lo...

Страница 42: ...rease on plate surface or valve body clean it with lint and dust free cloth Allen torque wrench 3mm Cleanroom wipes 31 Assemble valve unit with control and actuating Push axis C into clamp coupling Ta...

Страница 43: ...Series 616 MAINTENANCE 893179ED DOCX Edition 2020 01 22 43 56 Description Required tool 34 Reinstall valve into vacuum system according to chapter Installation...

Страница 44: ...Repairs may only be carried out by the VAT service staff In exceptional cases the customer is allowed to carry out the repairs but only with the prior consent of VAT Please contact one of our service...

Страница 45: ...ed work 9 1 Dismounting NOTICE Contamination Gate and other parts of the valve must be protected from contamination Always wear clean room gloves when handling the valve NOTICE Valve in open position...

Страница 46: ...ive humidity between 10 and 70 temperature between 10 C and 50 C non condensing environment NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used Always us...

Страница 47: ...rning products to VAT please fill out the VAT form Declaration of Chemical Contamination of Vacuum Valves and Components and send it to VAT in advance The form can be downloaded from our website www v...

Страница 48: ...DOCX 10 2 Transport NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used Always use the original packaging material and handle product with care VAT discl...

Страница 49: ...L 893179ED DOCX Edition 2020 01 22 49 56 11 Disposal WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage Only qualified personnel are allowed to carry out...

Страница 50: ...rder for spare parts see chapter Identification of product This is to ensure that the appropriate spare parts are supplied VAT makes a difference between spare parts that may be replaced by the custom...

Страница 51: ...893179ED DOCX Edition 2020 01 22 51 56 12 1 Drawing 1 Body with mechanism 5 Plate screws 2 Lever complete 6 Body complete 3 Adapter flange rod with bearing 7 Plate 4 Rotary feedtrough seals 8 Plate o...

Страница 52: ...3 Spare parts kit adapter flange rod with bearing 453094 453106 5 Plate screws 2 428946 6 Body complete 443116 443180 7 Spare parts plate 433800 431309 12 1 2 ISO KF valve unit stainless steel without...

Страница 53: ...are available on request 12 1 4 Control and actuating unit Description Part number Control and actuating unit Please contact VAT Option board with SPS module 15 VDC Sensor Power Supply 378000 Option b...

Страница 54: ...X 12 1 5 1 Centering ring with Viton o ring Description Valve size Product ordering number DN 40 1 61632 DN 50 2 61634 Centering ring with Viton o ring for ISO KF and ISO F installation only Aluminum...

Страница 55: ...Series 616 APPENDIX 893179ED DOCX Edition 2020 01 22 55 56 13 Appendix No information entered on time...

Страница 56: ...Series 616 56 56 Edition 2020 01 22 893179ED DOCX This page left blank intentionally...

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