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Sales and Service Offices

Argentina

Varian Argentina Ltd.

Sucursal Argentina
Av. Ricardo Balbin 2316
1428 Buenos Aires
Argentina
Tel: (54) 1 783 5306
Fax: (54) 1 786 5172

Australia

Varian Australia Pty Ltd.

679-701 Springvale Road
Mulgrave, Victoria ZZ 3170
Australia
Tel: (61) 395607133
Fax: (61) 395607950

Benelux

Varian Vacuum Technologies

Rijksstraatweg 269 H,
3956 CP Leersum
The Netherlands
Tel: (31) 343 469910
Fax: (31) 343 469961

Brazil

Varian Industria e Comercio Ltda.

Avenida Dr. Cardoso de Mello 1644
Vila Olimpia
Sao Paulo 04548 005
Brazil
Tel: (55) 11 3845 0444
Fax: (55) 11 3845 9350

Canada

Central coordination through:

Varian Vacuum Technologies
121 Hartwell Avenue
Lexington, MA 02421
USA
Tel: (781) 861 7200
Fax: (781) 860 5437
Toll Free: (800) 882 7426

China

Varian Technologies - Beijing

Room 1201, Jinyu Mansion
No. 129A, Xuanwumen Xidajie
Xicheng District
Beijing 1000031 P.R. China
Tel: (86) 10 6608 1530
Fax: (86) 10 6608 1534

France and Wallonie

Varian s.a.

7 avenue des Tropiques
Z.A. de Courtaboeuf – B.P. 12
Les Ulis cedex (Orsay) 91941
France
Tel: (33) 1 69 86 38 13
Fax: (33) 1 69 28 23 08

Germany and Austria

Varian Deutschland GmbH

Alsfelder Strasse 6
Postfach 11 14 35
64289 Darmstadt
Germany
Tel: (49) 6151 703 353
Fax: (49) 6151 703 302

India

Varian India PVT LTD

101-108, 1st Floor
1010 Competent House
7, Nangal Raya Business Centre
New Delhi 110 046
India
Tel: (91) 11 5548444
Fax: (91) 11 5548445

Italy

Varian Vacuum Technologies

Via F.lli Varian, 54
10040 Leini, (Torino)
Italy
Tel: (39) 011 997 9111
Fax: (39) 011 997 9350

Japan

Varian Vacuum Technologies

Sumitomo Shibaura Building, 8th Floor
4-16-36 Shibaura
Minato-ku, Tokyo 108
Japan
Tel: (81) 3 5232 1253
Fax: (81) 3 5232 1263

Korea

Varian Technologies Korea, Ltd.

Shinsa 2nd Bldg. 2F
966-5 Daechi-dong
Kangnam-gu, Seoul
Korea 135-280
Tel: (82) 2 3452 2452
Fax: (82) 2 3452 2451

Mexico

Varian S.A.

Concepcion Beistegui No 109
Col Del Valle
C.P. 03100
Mexico, D.F.
Tel: (52) 5 523 9465
Fax: (52) 5 523 9472

Taiwan

Varian Technologies Asia Ltd. 

18F-13 No.79, Hsin Tai Wu Road
Sec. 1, Hsi Chih
Taipei Hsien
Taiwan, R.O.C.
Tel: (886) 2 2698 9555
Fax: (886) 2 2698 9678

UK and Ireland 

Varian Ltd.

28 Manor Road
Walton-On-Thames
Surrey KT 12 2QF
England
Tel: (44) 1932 89 8000
Fax: (44) 1932 22 8769

United States

Varian Vacuum Technologies

121 Hartwell Avenue
Lexington, MA 02421
USA
Tel: (781) 861 7200
Fax: (781) 860 5437
Toll Free: (800) 882 7426

Other Countries

Varian Vacuum Technologies

Via F.lli Varian, 54
10040 Leini, (Torino)
Italy
Tel: (39) 011 997 9111
Fax: (39) 011 997 9350

Internet Users:

Customer Service & Technical Support:

[email protected]

Worldwide Web Site:

www.varianinc.com/vacuum

Order On-line:

www.evarian.com

Representatives in most countries

11/01

Содержание Turbo-V 969-9831

Страница 1: ...87 900 806 01 F MAY 2005 INSTRUCTION MANUAL Turbo V Vent Device Model 969 9831 vacuum technologies ...

Страница 2: ...Turbo V Vent Device ...

Страница 3: ......

Страница 4: ......

Страница 5: ...ENT DEVICE SPECIFICATIONS 3 Control Unit 3 Vent Valve 3 TURBO V VENT DEVICE OUTLINE 3 CONTROL UNIT INSTALLATION 4 VENT VALVE INSTALLATION 4 OPERATION 4 TIME SETTING 5 VENT CONTROL UNIT DESCRIPTION 6 Power Circuit 6 Protection Circuit 6 Timer Circuit 6 TURBO V VENT DEVICE REPLACEMENT PARTS 7 ...

Страница 6: ... Cautions are used when failure to observe instructions could result in damage to equipment whether Varian supplied or other associated equipment NOTE Information to aid the operator in obtaining the best performance from the equipment TURBO V VENT DEVICE DESCRIPTION The 969 9831 Turbo V vent device consisting of a vent control unit and a vent valve is a complete unit suitable for automatic ventin...

Страница 7: ...sent Turbo V pump ON relay RL1 allows the integral battery to be recharged then the timer circuits are inhibited and reset When the Turbo V is shut off RL1 still remains energized and the delay timer counter starts After the pre set delay time the valve opens and the venting time count starts At the end of the venting time relay RL1 de energizes and the battery is disconnected The battery is prote...

Страница 8: ...t line Output to valve 1 5 metres long two conductor wire 5 metres long two conductor wire Weight 1 3 Kg 2 9 lbs Vent Valve High vacuum flange NW 10 KF Gas entrance Riffled nozzle 4 8 mm 0 19 O D Tube 1 4 Orifice size 1 2 mm 0 05 Pressure range 10 6 mbar to 1bar 10 7 Torr to atm Leak rate 1x10 7 mbar l s Life cycle One million cycles Input voltage power 24 Vdc 10 5 1 W Bakeout temperature 60 C 140...

Страница 9: ... gas bottle line is used check the correct venting time to prevent overpressuring the Turbo V pump CAUTION It is strongly recommended to power the vent unit using the 120 Vac terminal available on the Turbo V controller rear panel This will ensure that it is correctly sequenced NOTE The Turbo V vent device has been designed to vent the Turbo V pump only To vent the chamber it is advisable to insta...

Страница 10: ... venting time of 4 minutes proceed as follows Adjust the delay time rotary switch to 8 and place the jumper across 1 16 minute Adjust the venting time rotary switch to 8 and place the jumper across 1 2 minute CAUTION Use the appropriate tool to adjust the time settings to avoid damages to the rotary switches The minimum venting times for each Turbo V pump series with the high vacuum flange blanked...

Страница 11: ...ischarge of the battery a sensor circuit is provided When the battery voltage reaches 4 5 V transistor Q4 is cut off Subsequently relay RL1 deenergizes and the battery is disconnected Even though the battery is designed to accept overcharging to avoid thermal runaway problems caused by overcharging diodes D7 and D9 are provided This circuit allows an automatic adjustment of the charging voltage in...

Страница 12: ...718 02 Gas filter 28 900008 01 Battery 6 V 1Ah 74 103100 01 Relay 6V 72 114110 01 Transformer T1 120 12V 8VA 03 660295 L E D yellow LT4223 67 560005 L E D red LT4253 67 560004 For a complete overview of Varian s extensive vacuum product line please refer to the Varian Vacuum Catalogue Turbo V Vent Control Unit Schematic Diagram ...

Страница 13: ...NTIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping Error Evaluation Return Calibration Other HEALTH and SAFETY CERTIFICATION Varian Vacuum Technologies CAN NOT ACCEPT any equipment which contains BIOLOGICAL HAZARDS or RADIOACTIVITY Call Varian Custome...

Страница 14: ...ate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Other Customer application Customer application PRIMARY PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump describe Heater failure Electrical problem Doesn t reach vacuum Over temperature Doesn t reach v...

Страница 15: ...ian India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Japan Varian Vacuum Technologies Sumitomo Shibaura Building 8th Floor 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Fax...

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