Varian Turbo-V 969-9831 Скачать руководство пользователя страница 12 | Manualshive

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Varian Turbo-V 969-9831 Скачать руководство пользователя страница 12

TECHNICAL INFORMATION

87-900-806-01 (F)

7

TURBO-V VENT DEVICE REPLACEMENT PARTS

DESCRIPTION

PART NUMBER

Vent valve (complete)

03-661718-02

Gas filter

28-900008-01

Battery 6 V 1Ah

74-103100-01

Relay 6V

72-114110-01

Transformer T1 (120/12V, 8VA)

03-660295

L.E.D. (yellow) LT4223

67-560005

L.E.D. (red) LT4253

67-560004

For a complete overview of Varian's extensive vacuum product line, please refer to the Varian Vacuum Catalogue.

Turbo-V Vent Control Unit Schematic Diagram

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Содержание Turbo-V 969-9831

Страница 1: ...87 900 806 01 F MAY 2005 INSTRUCTION MANUAL Turbo V Vent Device Model 969 9831 vacuum technologies ...

Страница 2: ...Turbo V Vent Device ...

Страница 3: ......

Страница 4: ......

Страница 5: ...ENT DEVICE SPECIFICATIONS 3 Control Unit 3 Vent Valve 3 TURBO V VENT DEVICE OUTLINE 3 CONTROL UNIT INSTALLATION 4 VENT VALVE INSTALLATION 4 OPERATION 4 TIME SETTING 5 VENT CONTROL UNIT DESCRIPTION 6 Power Circuit 6 Protection Circuit 6 Timer Circuit 6 TURBO V VENT DEVICE REPLACEMENT PARTS 7 ...

Страница 6: ... Cautions are used when failure to observe instructions could result in damage to equipment whether Varian supplied or other associated equipment NOTE Information to aid the operator in obtaining the best performance from the equipment TURBO V VENT DEVICE DESCRIPTION The 969 9831 Turbo V vent device consisting of a vent control unit and a vent valve is a complete unit suitable for automatic ventin...

Страница 7: ...sent Turbo V pump ON relay RL1 allows the integral battery to be recharged then the timer circuits are inhibited and reset When the Turbo V is shut off RL1 still remains energized and the delay timer counter starts After the pre set delay time the valve opens and the venting time count starts At the end of the venting time relay RL1 de energizes and the battery is disconnected The battery is prote...

Страница 8: ...t line Output to valve 1 5 metres long two conductor wire 5 metres long two conductor wire Weight 1 3 Kg 2 9 lbs Vent Valve High vacuum flange NW 10 KF Gas entrance Riffled nozzle 4 8 mm 0 19 O D Tube 1 4 Orifice size 1 2 mm 0 05 Pressure range 10 6 mbar to 1bar 10 7 Torr to atm Leak rate 1x10 7 mbar l s Life cycle One million cycles Input voltage power 24 Vdc 10 5 1 W Bakeout temperature 60 C 140...

Страница 9: ... gas bottle line is used check the correct venting time to prevent overpressuring the Turbo V pump CAUTION It is strongly recommended to power the vent unit using the 120 Vac terminal available on the Turbo V controller rear panel This will ensure that it is correctly sequenced NOTE The Turbo V vent device has been designed to vent the Turbo V pump only To vent the chamber it is advisable to insta...

Страница 10: ... venting time of 4 minutes proceed as follows Adjust the delay time rotary switch to 8 and place the jumper across 1 16 minute Adjust the venting time rotary switch to 8 and place the jumper across 1 2 minute CAUTION Use the appropriate tool to adjust the time settings to avoid damages to the rotary switches The minimum venting times for each Turbo V pump series with the high vacuum flange blanked...

Страница 11: ...ischarge of the battery a sensor circuit is provided When the battery voltage reaches 4 5 V transistor Q4 is cut off Subsequently relay RL1 deenergizes and the battery is disconnected Even though the battery is designed to accept overcharging to avoid thermal runaway problems caused by overcharging diodes D7 and D9 are provided This circuit allows an automatic adjustment of the charging voltage in...

Страница 12: ...718 02 Gas filter 28 900008 01 Battery 6 V 1Ah 74 103100 01 Relay 6V 72 114110 01 Transformer T1 120 12V 8VA 03 660295 L E D yellow LT4223 67 560005 L E D red LT4253 67 560004 For a complete overview of Varian s extensive vacuum product line please refer to the Varian Vacuum Catalogue Turbo V Vent Control Unit Schematic Diagram ...

Страница 13: ...NTIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping Error Evaluation Return Calibration Other HEALTH and SAFETY CERTIFICATION Varian Vacuum Technologies CAN NOT ACCEPT any equipment which contains BIOLOGICAL HAZARDS or RADIOACTIVITY Call Varian Custome...

Страница 14: ...ate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Other Customer application Customer application PRIMARY PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump describe Heater failure Electrical problem Doesn t reach vacuum Over temperature Doesn t reach v...

Страница 15: ...ian India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Japan Varian Vacuum Technologies Sumitomo Shibaura Building 8th Floor 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Fax...

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