INSTRUCTIONS FOR USE
68 87-900-988-01 (B)
ERROR MESSAGES
For a certain type of failure, the controller will self-
diagnose the error and the messages described in the
following table are displayed.
MESSAGE
DESCRIPTION
REPAIR ACTION
CHECK CONNECTION TO
PUMP
Wrong connection between the pump
and the controller.
Check connection between controller and
pump.
Press the START push-button twice to start
the pump.
PUMP WAITING
INTERLOCK
The interlock signal of P1 connector is
activated by an interruption of the link
between pin 3 and 8 of J1 connector, or
because the external interlock signal is
open.
Reset the short circuit between pin 3 and
pin 8 of J1 connector, or close the external
interlock signal.
FAULT: PUMP OVERTEMP.
The pump upper bearing temperature
exceeded 60 °C.
Wait until the temperature decrease below
threshold value.
Press the START push-button twice
to start the pump.
FAULT: CONTROLLER
OVERTEMPERATURE
The controller transformer temperature
exceeded 90 °C.
Wait until the temperature decrease below
threshold value.
Press the START push-button twice to
start the pump.
FAULT: TOO HIGH LOAD
In normal operation, the current drawn
by the pump is higher than programmed.
Check that the pump rotor is free to rotate.
Press the START push-button twice to start
the pump.
FAULT: SHORT CIRCUIT
In normal operation (after the starting
phase) the output connection is shorted.
Check connections and shortages between
pump and controller. Press the START
push-button twice to start the pump.
OVERVOLTAGE
A failure has occurred in the controller
power supply section, or the controller
has received a spurious signal.
Press the START button twice to start the
pump again. If the message is redisplayed,
contact Varian for maintenance.
FLOW METER ALARM
Alarm relating to the purge flow. The flow
value remained at less than the set
threshold for 10 seconds or more.
Check the correct operation of the gas
supply circuit.