background image

 

B

 

Warning Label 

 

Warning 

 

Check the 

capacity

 

Primary power supply 

Please prepare the following: Single-phase 100 V, 6.3 A 

Smaller power supply capacity may cause the breaker to trip due to 
overcurrent during the operation. 

 

Do not share

 

For the primary power supply, a single power supply 

should be provided for the device, and other equipment 

should not be connected with it. 

Breaker capacity shortage may cause the breaker to trip due to 
overcurrent during the operation.

 

 

Ground the 

grounding wire

 

Employ Level D grounding. 

Use a plug with grounding wire for 100-V power supply. 

If you use a plug adapter, connect the grounding wire 

with a nearest grounding terminal. 

If incorrect grounding is made, this may cause electrical shock in 
case of failure or current leakage.

 

 

Check the 

cable capacity

 

Avoid using an extension cable. However, if it must be 

used by necessity, use the following cable. 

For 100-V power supply: 1.25 mm

or more 

If a thinner cable is used, this may cause overheating, ignition, or 
fire. 

 

Avoid this 

action

 

Do not place any object on the cable for the primary side.

Otherwise, such action may cause electrical shock or fire. 

 

Avoid electrical 

shock

 

Do not touch the terminal block or other connectors if the 
primary cable plug is being inserted in a socket. 

Otherwise, the operator may suffer electrical shock. 

 

Caution 

 

Check labels

 

The warning labels are pasted on the following parts. 

1) Left back of the rack (PL004) 

2) Main valve handle (PL008) 

3) Around the oil diffusion pump (D. P) (PL007) 

 

When accompanied by a liquid nitrogen trap. 

4) Liquid nitrogen trap (PL006) 

 

Contact us if the label is contaminated or peeling off. 

Power Supply 

Содержание VPC-051

Страница 1: ...l thoroughly to ensure safe and effective operation of this equipment Keep this manual in a safe place Please note that due to performance upgrade the equipment described in this manual is subject to...

Страница 2: ...vidual Unit Specifications 3 5 Standard Accessories 4 6 How to Use Switches Handles and Operation Levers 4 7 Layout of Switches Handles and Operation Levers 5 Evacuation system drawing Electrical syst...

Страница 3: ...3 Removal Maintenance and Installation of Devices 12 3 1 Oil sealed rotary vacuum pump 12 3 2 Oil diffusion pump 12 3 3 Oil mist trap 13 4 Maintenance and Inspection Points 13 5 Troubleshooting 14 6 S...

Страница 4: ...duced without permission of Ulvac Kiko Inc Read this section before using the VPC 051 Always follow the instructions below to safely use the device and prevent personal injuries from occurring The sym...

Страница 5: ...rical shock in case of failure or current leakage Check the cable capacity Avoid using an extension cable However if it must be used by necessity use the following cable For 100 V power supply 1 25 mm...

Страница 6: ...tion outlet of the oil sealed rotary vacuum pump during roughing operation Use an oil mist trap sold separately Otherwise oil spread may contaminate the room or affect human health Ventilate Pump is h...

Страница 7: ...gen splashes and adheres to your skin you may feel acute pain momentary Confirm complete close After confirming complete closure of the main valve let out the air in the bell jar If air comes into the...

Страница 8: ...than the above contact us Replace periodically Oil mist trap sold separately should be replaced every six months to one year Clogging in the element increases evacuation resistance which may cause oi...

Страница 9: ...cations or repairs carried out by a party other than the manufacturer or by a service company not approved by the manufacturer e Malfunctions caused by noise electric disturbance f Malfunctions that o...

Страница 10: ...is vacuum pump unit as a vacuum vessel Reselling repairing and refurbishing of the product that are not permitted by us Avoid this action 2 Safety Device and its Purpose and Functions Item Purpose Fun...

Страница 11: ...320 mm Height 461 mm Approx 20 kg Finished color Rack Panel baking finish Munsell 6Y 8 0 8 baking finish Munsell 6Y 8 0 8 4 Individual Unit Specifications Unit Model and Specifications Quantity 1 Oil...

Страница 12: ...d Operation Levers Confirm Before handling switches handles or operation levers confirm the safety and conditions Name How to Operate MAIN switch Manual ON OFF BACK P switch Manual ON OFF ON lamp illu...

Страница 13: ...5 7 Layout of Switches Handles and Operation Levers Evacuation system drawing 1 100V 0 63kVA Electrical system drawing...

Страница 14: ...here the following conditions are satisfied 1 Flat surface 2 Floor with sufficient strength 3 Well ventilated place 4 Place without direct sunlight 5 Room with temperatures between 7 C and 30 C 6 Loca...

Страница 15: ...g wire Employ Level D grounding The grounding wire is the green wire Use a plug with grounding wire for 100 V power supply If you use a plug adapter connect the grounding wire with a nearest grounding...

Страница 16: ...es When using liquid nitrogen wear gloves to protect your hands If liquid nitrogen splashes and adheres to your skin you may feel acute pain momentary Confirm complete close After confirming complete...

Страница 17: ...in valve flange CHECK 2 VENT V main valve CLOSE 3 Three way valve ROUGH 13pa or less CHECK 4 Three way valve FORE 5 Main valve COMPLETE CLOSE 6 When an ionization gauge is use Filament ON 2 3 Stop Vac...

Страница 18: ...ressure for about 30 minutes This is not a failure Close the MAIN valve to prevent inside of the bell jar from contamination 3 Measures upon Abnormal Conditions 3 1 Instantaneous power outage All devi...

Страница 19: ...tion resistance which may cause oil leakage from the axis sealing area or oil level gauge damage Work by two or more people Installation and removal of the oil diffusion pump and oil sealed rotary vac...

Страница 20: ...oval procedure All devices of the coater stop Confirm The primary power supply of the coater is removed Confirm VENT V of roughing piping is open Confirm Three way valve FORE Leave the inside of the D...

Страница 21: ...nce and Inspection Points Unit Maintenance and Inspection Timing of Maintenance and Inspection Oil sealed rotary vacuum pump Confirm that the oil level of the oil level gauge is within the indicated l...

Страница 22: ...ect air intake leakage etc replace the oil Failure in the oil sealed vacuum pump Refer to the Oil Sealed Vacuum Pump User s Manual Failure in measuring instrument Replace the measuring instrument The...

Страница 23: ...OK O ring for leakage valve N 8 NBR 1 OK Oil diffusion pump Gasket for suction flange 57 48 t5 NBR 1 OK Oil for use SY 0 02L OK Mica heater Single phase 100 V 0 25 kW 1 NG Vacuum hose for MAIN P 12 30...

Страница 24: ...this action Do not use other manufacturer s optional parts for modification We do not assume any responsibility for any damage due to such modifications 1 Standard Optional Parts List Name of optional...

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