3
3. Product Specifications
Ultimate pressure
7.0 x 10
-4
Pa
(Upon no-load cleaning in vacuum chamber)
1.5 x 10
-4
Pa
(Using liquid nitrogen, upon no-load cleaning
in vacuum chamber)
Evacuation time
15 minutes or less up to the 1.0 x 10
-3
Pa
(Upon no-load cleaning in vacuum chamber)
10 minutes or less up to the 1.0 x 10
-3
Pa
(Using liquid nitrogen, upon no-load cleaning
in vacuum chamber)
Necessary power
Single-phase 100 V, 0.63 kVA
External dimensions
(Main unit)
Weight(Main unit)
Width:350 mm × Depth: 320 mm × Height: 461 mm
Approx. 20 kg
Finished color(Rack)
(Panel)
baking finish (Munsell 6Y 8/0.8)
baking finish (Munsell 6Y 8/0.8)
4. Individual Unit Specifications
Unit
Model and Specifications
Quantity
1) Oil diffusion pump
(MAIN. PUMP)
- Model:
DPF-050
- Evacuation speed:
50 L/sec
- Ultimate pressure:
10
–5
Pa
- Evacuation or
VG 25 or equivalent,
suction opening:
φ
13.6 or equivalent
- Required power:
0.25 kVA
Oil for use:
SY, 0.02L
1 set
2) Oil sealed rotary
vacuum pump
(BACK. PUMP)
- Model:
G-20DA
- Evacuation speed:
20 L/min
- Ultimate pressure:
1.3 x 10
–1
Pa
- Required power:
0.1 VA
Oil for use:
SMR-100, 0.18L
1 set
3) Main valve
- Model:
Butterfly Valve
- Internal diameter:
VG-25
1 set
4) Three-way valve
- Model:
Ball valve type
1 set
