10
Note In the case of with liquid nitrogen trap.
Liquid nitrogen volume
Max. fill-in volume: Approx. 0.4 liters
(including vaporization volume upon fill-in)
The liquid nitrogen lasts approx. 4 hours when a volume of 0.4 liters
is filled.
If all of the liquid nitrogen is vaporized, the trapped condensable gases are
released, which causes an adverse effect on the pressure for about 30
minutes.
This is not a failure.
Close the MAIN valve to prevent inside of the bell jar from contamination.
3. Measures upon Abnormal Conditions
3-1 Instantaneous power outage
- All devices automatically return to the conditions before the power
outage.
3-2 Long power outage
1) Main valve: PROMPT and COMPLETE
CLOSE
2) Three-way valve:
CLOSE
3) VENT. V (of roughing piping):
OPEN
4) All switches on the operation panel:
OFF
3-3 Operation after power recovery
Please refer to 2-1 Preparation and 2-2 Operations in “2. Evacuation
Device Operation Procedure”.
