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(5) Maintenance and Repair
1. Risks and Safety Measure upon Maintenance and Repair
Warning
Wear
protective gear
Wear a dust-proof mask and gloves to
replace the oil of the oil diffusion pump.
This could cause risk to human health.
Caution
Comply with
regulations
To dispose the oil (waste oil) for the pump
and container, comply with industrial waste
disposal rules.
Comply with regulations upon disposal.
For details on disposal, contact us.
Replace
periodically
Oil mist trap (sold separately) should be
replaced every six months to one year.
Clogging in the element increases evacuation
resistance, which may cause oil leakage from the
axis sealing area or oil level gauge damage.
Work by two or
more people
Installation and removal of the oil diffusion
pump and oil sealed rotary vacuum pump
should be performed by two or more people.
Otherwise, you could injure your back.
Avoid this
action
Do not make any modification of the product
that is not permitted by Ulvac Kiko, Inc.
We do not assume any responsibility for any damage
due to such modifications.
2. Maintenance and Repair that Can be Made by User
1) Replacement of oil for the sealed vacuum pump and oil diffusion
pump.
2) Replacement of the element of oil mist trap (sold separately)
3) O-ring replacement (except for oil sealed rotary vacuum pump)
To make repair or maintenance other than the above, contact us.
