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3. Removal, Maintenance, and Installation of Devices
3-3 Oil Mist Trap OMT-050A (Sold Separately)
1) Required tools None
2) Removal procedure
- Rotate the lower portion of the oil mist trap counter-clockwise with both
hands
3) Replace the element.
Please refer to Oil Mist Trap OMT-050A User’s Manual
4) Order of attachment
- Place the attached O-ring on the lower face of the oil mist trap body.
- Rotate the lower portion of the oil mist trap clockwise with both hands
to adjust to the evacuation opening of the oil sealed vacuum pump.
Caution: Tighten with the O-ring held.
4. Maintenance and Inspection Points
Unit
Maintenance and Inspection
Timing of
Maintenance and
Inspection
Oil sealed
rotary vacuum
pump
Confirm that the oil level of the oil
level gauge is within the indicated
lines.
Every time before
using
Replace oil.
If the pressure during isolated
operation is 5 Pa or more.
As necessary
Oil diffusion
pump
Replace oil.
If the ultimate pressure and the
exhaust time is changed after an
incorrect air intake.
If the ultimate pressure and the
exhaust time is changed after long
years of continuous use.
As necessary
Cooling fan
Confirm that cooling fan rotates.
Every time before
using
Main valve
Clean the surface of the valve seat.
6 months to 1 year
When foreign material
is dropped on the
surface.
Oil mist trap
Replace the element.
6 months to 1 year
