24
ULVAC CRYOGENICS INCORPORATED
Icon
Description
Corrective Action
⑤
EMS SWITCH
Emergency stop button is pressed
Return the Emergency
stop button to the
original position.
⑥
DEWER LEVEL SNSR1
Broken wire detected in LN
2
level
gauge
Please contact us.
⑦
DEWER LEVEL SNSR2
Broken wire detected in LN
2
level
gauge
⑧
DEWER PRESS SNSR
Broken wire detected in dewar
pressure gauge
⑨
GN2 SPLY SNSR
Broken wire detected in nitrogen gas
supply flow meter
⑩
GN2 DISCH SNSR
Broken wire detected in nitrogen gas
discharge flow meter
⑪
GN2 SPLY FLOW RATE
Inappropriate supply volume of
nitrogen gas
Check that the N
2
gas
generator flow rate is
within the range of 26 –
30L/min.
Refer to the instruction
manual of N
2
gas
generator for the detail.
⑫
DEWER LEVEL SNSR3
Broken wire detected in LN
2
level
gauge
Please contact us.
GN ALARM
Touch GN ALARM in ALARM MENU to turn to the screen in Figure 9-6.
When GN ANS TIME OUT is red and blinking, there is an error in the operation signal of nitrogen gas
generator
When N2 SUPPLY TIME OUT is red and blinking, there is an error in the LN
2
supply signal.
Refer to the instruction manual of the nitrogen gas generator for how to clear the alarm state.
Figure 9-6
GN ALARM
Содержание UMP-40W
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