Ulvac UMP-40W, Инструкция по эксплуатации

Страница: 25 / 52

ULVAC CRYOGENICS INCORPORATED 19
Electric Wiring
CO
MP
AN
S
RE
F
AN
S
CO
MP
AL
M
CO
MP
ON
RE
F
ON
10
7
GN
RU
N
AN
S
GN
N2
SU
PP
LY
LN
2
SU
PP
LY
DE
ST
IN
AT
IO
N
SE
NS
OR
3 7
10
9 5 4
PL
C
KV
-N
24
DR
AI
O1
KV
-N
3A
M
AI
O2
KV
-N
3A
M
RM
C-
50
0
VT
3-
W4
T
PO
RT
2
GN
2
DI
SC
HA
RG
E
CO
MP
PO
WE
R
ON
GN
RU
N
OP
-8
69
17
AP
-3
2P
FD
-V
40
AP
FD
-V
40
AP
FD
-A
50
FD
-A
50
GN
2
SU
PP
LY
GN
2
DI
SC
HA
RG
E
DE
WA
R
PR
ES
SU
RE
LN
2
LE
VE
L
1 2
11 12
RM
C-
50
0
1
～
5V
1
～
5V
4
～
20
mA
4
～
20
mA
SE
RI
AL
MS
2-
H7
5
L1 L2 L3
T1 T2 T3
A1
A2
MC
1
L1 L2 L3 PE
LN
2
AU
TO
SU
PP
LY
LN
2
MA
NU
AL
SU
PP
LY
PS
1
DC
Po
we
r
su
pp
ly
TP
1
To
uc
h
pa
ne
l
di
sp
la
y
Pr
og
ra
mm
ab
le
co
nt
ro
ll
er
Co
nt
ro
l
bo
x
Gr
ou
nd
in
g
Fr
am
e
Gr
ou
nd
in
g
9 4
TB
1
TB
2
EM
S
OK
TB
3
TB
3
1 2 3 4 5 6
RL
1
SV
2
D2
SV
1
SV
3
D1 D3
L N E
+ -
I> I>
15
AT
CP
1
I>
5A
T
CP
2
EM
S
D4
EB
1
T3 T2 T1
L1 L2 L3
I> I> I>
30
AT
EL
B1
L1 L2 L3
P2
4V
2
50
2
C3
C1
24
V
C1
50
0
50
0
0V C0 00
0
00
1
00
2
00
3
00
4
00
5
00
6
00
7
01
2
01
3
V0
+
I0
+
C0
V1
+
I1
+
C1
V2
+
I2
+
C2
V0
+
I0
+
C0 I1
+
C1
V2
+
I2
+
C2
01
0
01
1
00
8
00
9
C2
C2
50
1
C3 C4
50
3
50
4
50
5
C5
50
1
50
3
50
6
50
6
50
7
50
8
C5
50
9
50
7
50
8
FG
C3 50
2
NC
1 2 3 4 5 6 7 8
BL BK YL
50
2
+
-
L1
1
L2
1
L3
1
PE
(A
WG
#1
0
GN
/Y
L)
(A
WG
#1
0
BK
)
(A
WG
#1
0
BK
)
(A
WG
#1
0
BK
)
(A
WG
#1
0
BK
)
(A
WG
#1
0
BK
)
(A
WG
#1
0
BK
)
(A
WG
#1
6
BK
)
E1
E4
E4
(A
WG
#1
6
GN
/Y
L)
(A
WG
#1
6
BL
)
(A
WG
#1
6
BL
)
P2
4V
2
N2
4V
(A
WG
#2
0
BL
)
(A
WG
#2
0
BL
)
00
0
00
1
00
2
00
3
00
4
01
3
01
2
01
1
01
0
(A
WG
#2
0
BL
)
(A
WG
#2
0
BL
)
(A
WG
#2
0
BL
)
(A
WG
#2
0
BL
)
(A
WG
#2
0
BL
)
(A
WG
#2
0
BL
)
(A
WG
#2
0
BL
)
(A
WG
#2
0
BL
)
(A
WG
#2
0
BL
)
AN
1+
AN
1C
(A
WG
#2
0
BL
)
(A
WG
#2
0
BL
)
AN
2+
AN
2C
AN
3C
AN
3+
AN
4+
AN
4C
00
1
00
2
00
3
00
0
N2
4V
P2
4V
2
N2
4V
P2
4V
2
N2
4V
P2
4V
2
N2
4V
P2
4V
2
P2
4V
2
P2
4V
2
(A
WG
#2
0
BL
)
(A
WG
#2
0
BL
)
(A
WG
#2
0
BL
)
(A
WG
#2
0
BL
)
(A
WG
#2
0
BL
)
(A
WG
#2
0
BL
)
(A
WG
#2
0
BL
)
N2
4V
(A
WG
#2
0
BL
)
(A
WG
#2
0
BL
)
(A
WG
#2
0
BL
)
N2
4V
P2
4V
3
C1 50
0
C2 50
1
50
2
C3
(A
WG
#2
0
BL
)
(A
WG
#2
0
BL
)
(A
WG
#2
0
BL
)
(A
WG
#2
0
BL
)
(A
WG
#2
0
BL
)
(A
WG
#2
0
BL
)
(A
WG
#2
0
BL
)
(A
WG
#1
6
BL
)
(A
WG
#2
0
BL
)
(A
WG
#2
0
BL
)
(A
WG
#2
0
BL
)
(A
WG
#2
0
BL
)
(A
WG
#1
6
BL
)
(A
WG
#1
6
BL
)
(A
WG
#2
0
BL
)
(A
WG
#2
0
BL
)
(A
WG
#2
0
BL
)
(B
N)
(P
K)
(B
L)
(B
N)
(P
K)
(B
L)
(B
N)
(P
K)
(B
L)
(A
WG
#2
0
BL
)
V1
+
(A
WG
#2
0
BL
)
(A
WG
#2
0
BL
)
00
7
00
8
00
7
00
8
00
7
00
8
(A
WG
#2
0
BL
)
(A
WG
#2
0
BL
)
00
5
00
6
L1
3
L2
3
P2
4V
1
E2 E3
(A
WG
#1
6
BK
)
(A
WG
#2
0
BL
)
P2
4V
3
N2
4V
P2
4V
2
P2
4V
3
00
0
P2
4V
2
N2
4V
(A
WG
#1
6
BL
)
(A
WG
#1
6
BL
)
(A
WG
#1
6
BL
)
(A
WG
#2
0
BL
)
(A
WG
#1
0
GN
/Y
L)
(A
WG
#1
0
GN
/Y
L)
E5
E6
RE
MO
TE
C3
0P
MV
RT
Co
ld
He
ad
Dr
iv
e
ca
bl
e
He
li
um
Co
mp
re
ss
or
Re
fr
ig
er
at
or
CH
1
PO
WE
R
1 2 3 4 5 6 7 8 9
10 11 12 13 14 15 16 17 18 19 20 21 22 23 24
1 2 3 4
1 2 3 4
1 2 3 E
E1
(A
WG
#1
0
GN
/Y
L)
P2
4V
2
00
2
C2 50
1
(A
WG
#2
0
BL
)
L1
2
L2
2
L3
2
(A
WG
#1
0
BK
)
(A
WG
#1
0
BK
)
(A
WG
#1
0
BK
)
RM
S1
50
T
（
SV
2
is
no
t
av
ai
la
bl
e
）
CP
1-
E1
W
LN
2
LE
VE
L
SE
NS
OR
1 2 3 4 5 6
00
1
C1 50
0
00
3
(A
WG
#1
6
GN
/Y
L)
(A
WG
#1
6
GN
/Y
L)
E7
MC
00
1
E7
19 3
MA
IN
S
22
0V
3
～
60
Hz
20
0V
3
～
50
Hz
(A
WG
#2
0
BL
)
Figure 8-1 Electric wiring UMP-40W