Ulvac GN-15i, Инструкция по эксплуатации

Страница: 17 / 32

ULVAC CRYOGENICS INCORPORATED 11
6. Electric Wiring
Ｃ
Ｐ
１
－
２
Ｃ
Ｐ
１
－
１
Ｃ
Ｐ
２
－
２
Ｃ
Ｐ
２
－
１
＋ － ＋ － ＋ － ＋ － ＋ － ＋ － ＋ －
２
A
F
U
1
J
P
A
C
1
0
0
V
A
C
1
0
0
V
HTR
EL B
1
1
6 4 3 5 7 8 9
1
0
1
1
3
1
2
1
4
3 2 4
1
1
1
6 4 2 3 5 7 8
1
0
9 1
1
2
1
3
1
4
3 2 4
5 3 2 1 4 3 2 1 4 6 7 8
3 1 2 4 3 1 2 4
3 2 1 4
3 1 2 4
5
5
C
N
2
1
C
N
2
3
C
N
1
9
C
N
1
8
C
N
1
6
C
N
2
2
C
N
2
4
R
M
T
1
R
M
T
2
GN D
N
L
TB 1
AC 10 0V
PS W1
-
+
-
+
AC
AC 10 0V
AC
-
+
-
+
AC
AC 10
0V
AC
PS W2
2
4
3
1
2 2
2
1
4
3
4
3
1
1
2
1
J
P
1
J
P
4
J
3
1
J
P
5
C
S
1
C
S
2
1
T
B
2
2
3
4
5
6
7
8
9
1
0
F
A
N
F
A
N
R U N 1
R U N 2
A L 1
A L 2
R M T 1
R M T 2
R U N 3
R U N 4
F
1
V
1
F
2
*
2
AC 10 0V
AC 10 0V
AC 10 0V
AC 10 0V
AC 10 0V
AC 10 0V
4
2
1
1
2
CN 2
1
1
2
2
3
4
CN 3
CN 4
6
5
7
8
9
10
2
1
3
4
5
6
CN 20
V0
V1
1
2
3
5
6
CN 7
(C T3 )
1
2
1
2
CN 9
(C T4 )
C
N
5
J
P
2
5 6 7 8
CN 1
(C T1 )
CN 6
(C T2 )
5
4
2
3
1
C
N
1
2
D
C
1
0
0
V
D
C
1
0
0
V
D
C
1
0
0
V
D
C
1
0
0
V
D
C
1
0
0
V
D
C
1
0
0
V
D
C
1
0
0
V
D
C
1
0
0
V
D
C
1
0
0
V
D
C
1
0
0
V
D
C
1
0
0
V
D
C
1
0
0
V
D
C
1
0
0
V
D
C
1
0
0
V
V2
(
S
V
7
)
2 2
C
N
1
7
C
N
1
5
(
S
V
6
)
2 1 1
C
N
1
4
(
S
V
5
)
(
S
V
4
)
C
N
1
3
2 1 1
C
N
1
1
(
S
V
3
)
C
N
1
0
(
S
V
2
)
1 2 1 2
(
S
V
1
)
2 1
C
N
8
P
S
1 2
J
P
DC 12 V+
+1 2V
+5 V
R
MT
C
HG
1
R
MT
C
HG
2
DC 12 V ＋
ＣＰ １－ 1
ＣＰ １－ 2
ＣＰ 2 － 1
ＣＰ 2 － 2
RM T 2
RM T 1
RM TC HG 1
RM TC HG 2
SS
R
1
S
SR
2
SW
1
L1
3P ｺﾝ ｾﾝ ﾄｹ ｰﾌ ﾞﾙ 2m
A
P
C
-
0
9
C
S
V
7
S
V
6
S
V
5
S
V
4
S
V
3
S
V
2
S
V
1
S
V
5
P
2
P
1
3 5 4 2 1
1 3
2
1
3
2
1
3
1
2
2
1
3
2
B
l
a
c
k
R
e
d
B
l
a
c
k
R
e
d
B
l
a
c
k
R
e
d
B
l
a
c
k
R
e
d
B
l
a
c
k
R
e
d
B
l
a
c
k
R
e
d
B
l
a
c
k
R
e
d
Re
mo
te
Op
er
at
in
g
Al
ar
m
St
at
e
N2
Su
pp
ly
Si
gn
al
Ou
tp
ut
Si
gn
al
In
pu
t
Ｏ
Ｎ
Re
mo
te
/
Ｏ
Ｆ
Ｆ
Lo
ca
l
Op
e
ra
ti
n
g
Li
g
ht
O
p
er
a
ti
on
SW
L2
Co
m
pr
es
s
or
Al
ar
m
L
ig
h
t
S
W2
A
la
rm
Cl
e
ar
S
W
S
W
3
M
ai
nt
e
na
n
ce
S
W
L
3
P
re
ss
u
re
Al
ar
m
L
ig
h
t
5V Po we r
12 V Po we r
J
P
N
o
.
Co
m
p1
,
2
M
o
un
t
2,
3
Ju
m
pe
r
2,
3
Ju
m
pe
r
1,
2
Ju
m
pe
r
1
,2
Ju
m
pe
r
Wi
t
ho
u
t
J
u
mp
e
r
B
l
a
c
k
B
l
u
e
S
y
m
bol
Na
m
e
A
P
C
-09C
C
ont
rol
boar
d
T
B
1
,2
T
er
m
inal
boar
d
S
V
1,
2,
3,
4,
5,
6,
7
S
ol
enoi
d v
al
ve
V1
S
ol
enoi
d v
al
ve
HT
H
eat
er
P
1,
2
A
ir
c
om
pr
es
s
or
L1
R
un/
S
top i
ndi
c
at
or
L2
C
om
pr
es
s
or
al
ar
m
l
ight
L3
P
res
s
ur
e al
ar
m
l
ight
F
1
C
ool
ing f
an
F
2
V
ent
ilat
ing f
an
PSW
1
12V
D
C
P
ow
er
s
uppl
y
PSW
2
5V
D
C
P
ow
er
s
uppl
y
SW
1
Loc
al
R
un/
S
top s
w
it
c
h
SW
2
A
lar
m
c
anc
el
s
w
it
c
h
SW
3
M
ai
nt
enanc
e s
w
it
c
h
E
LB
E
lec
tr
ic
l
eak
age
br
eak
er
CS
1
,2
C
ur
rent
s
ens
or
SSR
1
,2
S
ol
id s
tat
e r
el
ay
L
CD
LC
D
m
odul
e
PS
P
res
s
ur
e s
ens
or
F
U1
F
us
e (
2A
)