ULVAC CRYOGENICS INCORPORATED
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4) The operation light flashes
When the equipment has been running for longer than 8000 hours, the operation light
flashes during operation to inform that the inspection will be necessary soon.
Press Maintenance Finish button on the left of inside the equipment for 5 seconds or
so to reset.
The replacement interval of the compressor is about one year (10,000 hours) if
it has been running continuously. It is also necessary to check the
deterioration of adsorber, piping, couplings, or solenoid valves along with the
replacement. Please contact us.
5) When abnormal sound is heard
If there is a sound different from the normal operating sound, the equipment may have
trouble or failure. Unplug the power cable and contact us.
6) The supply pressure or flow rate is not in the range of specifications.
Adjust the pressure with the pressure regulator if the supply pressure of nitrogen gas
is not within the range of specifications.
If the flow rate of supplied nitrogen gas is different from the necessary rate when
nitrogen discharge pressure is within the range of specifications, adjust the flow rate at
the flow rate adjustment valve on the front panel of the equipment. If the discharge
pressure or flow rate does not return as intended, the possible cause may be the
equipment failure. Shut down operation, turn OFF the circuit breaker, unplug the
power supply and contact us.
Please contact us if there are other signs of failure than stated above.
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