ULVAC CRYOGENICS INCORPORATED
III
Table of Contents
Safety Instructions ·························································································· 1
1.
General ·································································································· 5
2.
Features ································································································ 5
3.
Component Descriptions ············································································ 6
3.1
External Dimensions and Component Description ········································· 6
3.2
Component Details ················································································· 7
4.
Flow Diagram ·························································································· 9
5.
Specifications ························································································ 10
5.1
Nitrogen generator specifications ····························································· 10
6.
Electric Wiring ······················································································· 11
7.
Unpacking and Installation ········································································ 12
7.1
Unpacking and Checking Contents ·························································· 12
7.2
Installation··························································································· 12
7.3
Electric Wiring ······················································································ 13
8.
Operation ····························································································· 14
8.1
Preparation before Operation ·································································· 14
8.2
Start-up and Stop (Tank pressure operation)*optional ··································· 14
9.
Maintenance ························································································· 16
9.1
Daily Inspections and Maintenance ·························································· 16
9.2
Overall Inspections ··············································································· 16
10.
Cautions before Use ··············································································· 17
11.
Troubleshooting ····················································································· 18
12.
Warranty ······························································································ 20
Содержание GN-15i
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