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4.Operating instructions
4.1 Operating precautions
Explosion hazard. Do not plug the exhaust port or place any materials
inside of the exhaust port, because it will reduce pumping speed during
operation. Pump explosion, oil level gauge bursting, or over loading of
the motor are consequences of excessive pressure inside the pump. This
pump is not a compressor.
The maximum pressure inside this pump is 0.03 MPa (GAUGE).
・In manufacturing process of semi-conductor, pump oil will be
contaminated in a very short term. First oil changing should be done
within 10 days. Then, after checking oil contamination, it should be
recommended to decide the interval for changing oil.
・When evacuating much quantity of water moisture, change oil frequently.
If operating pump a long term as taking water moisture into the pump,
this may cause deterioration of oil lubricity, corrosive acceleration
of parts inside the pump, also trouble of the pump.
・When evacuating chemicals (acid or like), change the pump oil after
stopping the pump immediately to prevent operational impossibility
owing to rusting while stopping it for one night.
・When evacuating solvents, change the pump oil after stopping the pump
to prevent deterioration of oil lubricity and trouble cause (sticking,
etc).
・Continuous running at suction presser higher than 1000Pa may cause high
consumable rates of pump oil and oil shortage. And too oil shortage may
also cause parts consumption and sticking, therefore supply pump oil
without fail.
