Ulvac G-101D, Инструкция по эксплуатации

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Problem Cause Measures Reference
⑥ The specified amount of oil has not
been added.
⑥ Add the specified amount of oil. 3.2
⑦
The oil has deteriorated.
⑦
Replace the oil. 6.3
⑧
Leakage occurs from the pipe
connected to the pump.
⑧
Locate the leakage with a leakage
detector and stop the leakage.
⑨ Our specified oil is not being used. ⑨ Overhaul the pump and replace
with oil specified by us
6.3
The pressure
does not
decrease.
⑩ Oil does not circulate, or the oil
hole of the cover is clogged.
⑩ Overhaul and clean the oil hole.
①
Problem with power supply voltage
①
Set the power supply voltage to
within
±
10% of the rated voltage.
3.5
②
The motor malfunctions.
②
Replace the motor.
③ Foreign matter has entered the
pump.
③ Eliminate the foreign matter and
overhaul the pump.
④ The specified amount of oil has not
been added.
④ Add the specified amount of oil. 3.2
⑤
Oil does not circulate, or the oil
hole of the cover is clogged.
⑤
Overhaul and clean the oil hole.
Abnormal
sound is
generated.
⑥
Components inside the pump have
burnt out.
⑥
Overhaul (replace the damaged
components).
① Continuous operation at high
evacuation pressure
① A pump is suspended or suction
pressure is set to 1kPa or less.
② The specified amount of oil has not
been added. (If the oil amount is not
sufficient, the cooling effect of the
pump will be reduced.)
② Add the specified amount of oil. 3.2
③
The temperature of the evacuated
gas is high.
③
Mount cooling equipment such as a
gas cooler at the inlet side.
Pump surfaces
are extremely
hot (50
℃ or
more higher
than the room
temperature)
④
Oil does not circulate, or the oil
hole of the cover is clogged.
④
Overhaul and clean the oil hole.
① The pump is been filled in excess of
the specified amount.
① Discharge the oil until it reduces to
the specified amount.
3.2 A lot of oil
splashes out
from the
exhaust port.
② Continuous operation is performed
at a high evacuation pressure.
② Install an oil mist trap at the outlet
side.
4.8
The oil leaks
outside the
pump.
①
Deterioration of the O-ring and the
oil seal of the case and cover
①
Check and replace the O-ring and
oil seal.
6.2