- 2 -
1.1.3
Warning Explosion
Cause
Prevention method and measures
The pressure in the pump
increased causing the pump
to explode.
⇒
The maximum internal pump pressure is 0.03 MPa (gauge
pressure).
Measure the pressure at the outlet side and, if the pressure
is 0.03 MPa or more (gauge pressure), remove objects
which block the passage of gas from the outlet side. When
an oil mist trap is adopted, replace or clean it so that it will
not block the passage of gas.
1.1.4
Caution High temperature
Cause
Prevention method and measures
High temperatures caused
burns.
⇒ ①
The pump reaches a high temperature during operation.
pump body
→
70
~
80
℃
motor
→
70
~
80
℃
②
Since the surface temperature is hot, touching the
surface accidentally may result in burns. Never touch
the pump during operation. When carrying out
inspection, wait until the pump has cooled down
completely after it stops.
1.2 Safety Data Sheet (SDS)
The attached “Safety Data Sheet (SDS)” shows chemical materials which may be used or
touched when operating the pump. Read the SDS carefully in order to understand the harmful
properties of these materials.
Contact us before using chemical materials (vacuum pump oil) other than those mentioned in
this instruction manual.
SDS is submitted as reference information to ensure safe handling of hazardous and
harmful materials. Personnel handling the pump oil should be aware that proper
measures must be taken depending on the conditions of use as their responsibility.
Keep in mind that the SDS itself is not a warranty for safety.
Caution