Ulvac EGL-206M, Инструкция по эксплуатации

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SECTION 6
40
6.3 Troubleshooting Guide
Trouble symptoms described in the manual are limited to those that have been
experienced by ULVAC and that can possibly happen. If a trouble occurs
simultaneously with that of the electron beam gun power supply, the
symptom may differ from that described here. In that event, also refer to the
troubleshooting guide for the E/B power supply.
DANGER
1. The voltage applied in the EB gun is enough to give danger to a human
life. If you touch the EB GUN or a surrounding of the EB GUN, turn off
the main breaker of the EB power supply and leave it for 5 minutes or
more.
2. Improper ground cable gives danger to a human life. Check the cable not
to loose the connection, or not to be superfluously long. The regulation of
ground is described in a EB power supply instruction manual.
3. Never use the EB gun in a humid environment. Even in low-voltage,
electric shock may occur. In case of water leakage, wipe up water and use
the EB gun after drying.
4. Never short-circuit the interlock circuit of the electron beam gun power
supply.
5. If a high voltage is applied during disassembling, reassembling or
checking of the electron beam gun, a serious accident can happen. Be sure
to turn OFF the main switch on the electron beam gun power supply and
keep the switch key yourself.
NOTE
Wear clean gloves on maintenance of a vacuum chamber.