Ulvac DOP-181S Series, Инструкция по эксплуатации

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Recommended clamping torque 0.2-0.5N
・
m.
With the above installation of the rubber leg is completion.
3.8 Piping
1) The plumbing of the leak perform it surely, and please attach a filter before a pump inlet
port so that there is not it.
2) The plumbing to the inlet port, use 12mm inside diameter or more.
3) The plumbing to the outlet port, use pipes not to take backing pressure. When it takes
backing pressure, please do below 0.03MPa (gauge pressure).
4) In case of selecting the inlet pipe and exhaust pipe that are not from our products, please
select the exhaust pipe that has same or larger inner diameter length with the inlet pipe.
5) Please attached the Shut off valve like figure 3-2 when evacuating a vessel.
Fig. 3-2 Example of Piping Used When Evacuating a Vessel
3.9 Storage
Switch off the main power supply and check that the pump remove the power cord connected
to the pump.
Place the rubber cap on the inlet / outlet port, and store in a location with low humidity.
Vacuum pump
Filter
Leak valve
Shut-off valve
Vessel
Quantity of screw jumping
out 0-2mm.
Rubber leg