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2.  System Description

2.1.  General

The figure in the hard copy manual shows the main features of the system.

The top half of the system houses the printer, video monitor and its controls.  The lower
half has the sample chuck and the keyboard, by which the sample and data are
manipulated.

2.2.  Specifications

Mechanical profilometer

Scanning Stylus: 12.5-micron radius
Zoom Video Microscope 40x to 120x Magnification
5 Angstrom Vertical Resolution
400 Angstrom Horizontal Resolution
Tracking Force - User adjustable 1 to 25 mg
Maximum Sample Dimensions - 16.5 mm thickness, 162 mm diameter

2.3.  Data Display

The Alphastep  200  digitizes  measurement  data  and stores  it  in  memory during the
scan.  When the scan has been completed, a plot of the  scan  is  displayed along  with
pertinent data and information on the scan characteristics.  The cursors displayed  on  the
plot are  positioned  by  the  operator  to  level the plot and/or obtain the desired data.
The figure in the hard copy manual shows what the display looks like.

The following describes the data display as read  from top to bottom:

ID#

Optional identifier for sample  assigned  by the user.   Can be up to 7 characters.

Pressing # when the system is  NOT  in  "Enter  Mode" (see  below)  will allow the user
to enter a number.  Pressing ENT, PRINT or initiating a scan will terminate the entry.

VERT Total vertical scale on plot  in  kA  or  Mm (specified by operator)

L

Profile height  at  intersection  with  left cursor.

R

Profile height at  intersection  with  right cursor.

Highlighted Value

Calculated  difference  between  heights  at cursors.

Avg

Average profile height between cursors measured relative to the baseline.

Содержание AlphaStep 200

Страница 1: ...e scan as well as scan profiles and a summary of scan data The system has three operating modes manual for single scans semiautomatic for multi point scans and automatic for repeated multi point scans The system allows the operator to set and store if desired a variety of scan parameters such as scan direction scan length sampling rate and vertical units kA vs Mm Measurement cursors are used to le...

Страница 2: ...ed a plot of the scan is displayed along with pertinent data and information on the scan characteristics The cursors displayed on the plot are positioned by the operator to level the plot and or obtain the desired data The figure in the hard copy manual shows what the display looks like The following describes the data display as read from top to bottom ID Optional identifier for sample assigned b...

Страница 3: ...ple density specifications scan time scan direction stylus force and the vertical units 2 4 Keyboard There is a figure showing the keyboard in the hard copy manual A brief description of key functions follows For further information on using the keyboard see the detailed operating procedures in Section 3 ENT Enter Pressing this button will initiate terminate Enter Mode in which the operator can ch...

Страница 4: ... change as either the or down arrow key is pressed PLOT Used to zoom in on a section of a profile between the measurement cursors or to level a profile CUR This key and its associated and keys allow the operator to set scan direction and place the measurement cursors LEVEL Used to level the baseline of a profile TABLE The and down arrow keys will move the sample chuck up and down respectively PRIN...

Страница 5: ...een You should see your sample come into view and the stylus lower and come to rest on the surface of your substrate If you continue to press TABLE the stylus will retract Thus the TABLE button toggles the stylus between its fully retracted and lowered position Always retract the stylus when moving the sample 6 Use the zoom knob to adjust the magnification of your sample Use the stage arrow keys t...

Страница 6: ...data summary on the left side of the screen The CUR button selects the cursor to be moved You can see the active cursor indicator appear over each cursor in turn and then over both as you repeatedly press this button When both cursors are active they will remain a fixed distance apart as they move simultaneously The arrow buttons will move the cursor s in the direction indicated Holding down these...

Страница 7: ...lly located at the ends other scan If one cursor is on a surface feature higher or lower than the other cursor the substrate will appear tilted when the program makes both cursor heights equal The condition described above can be corrected by moving the leveling cursors to places on the profile where the heights are equal Ideally these should both be on the substrate near the ends of the scan alth...

Страница 8: ...e screen showing the entire profile press ABT This undoes all zooming but leaves the cursors at their most recent positions on the profile Pressing CUR then ABT undoes all zooming and returns the cursors to the ends of the scan 4 5 Average Difference Mode In Average Difference mode the system computes the difference between average height measurements When this mode is entered the currently displa...

Страница 9: ...y 4 6 Printing There are three available printing modes Screen in which the entire contents of the screen including the plot of the profile is printed Summary Data prints out only the data shown on the left side of the screen Data Send sends all data to the RS 232C serial output instead of the printer Screen and Summary Data print modes are used to make print outs on the internal printer or on the...

Страница 10: ...that the paper unwinds from underneath as it leaves the spool This is thermal paper if you do not have the correct side facing the printer nothing will be printed on the paper 5 Insert the paper underneath the rubber roller from behind This is easier if the end of the paper is cut so that it tapers to a point 6 The paper will emerge at the top of the rubber roller aiming back Pull out several inch...

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