Tencor AlphaStep 200, Руководство пользователя

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Tencor Alphastep 200 Automatic Step Profiler
Contents
1. Introduction
2. System Description
2.1 General
2.2 Specifications
2.3 Data Display
2.4 Keyboard
3. Operating Procedures
3.1 Setting Scan Parameters
3.2 Scanning a Sample
4.
Manipulating Data
4.1 Overriding Vertical Auto-Ranges
4.2 Measurement Cursors - Measuring Profile Features
4.3 Leveling the Plot
4.4 Plotting Individual Profile Features - Zoom
4.5 Average Difference Mode
4.6 Printing
APPENDIX A Printer Paper Change
1. Introduction
The Alphastep 200 is a computerized step profiler with a programmable X-Y stage, and a
9" video monitor which displays a magnified view of the sample and stylus during the
scan, as well as scan profiles and a summary of scan data. The system has three
operating modes: "manual" for single scans; "semiautomatic" for multi-point scans; and
"automatic" for repeated multi-point scans. The system allows the operator to set, and
store if desired, a variety of scan parameters such as scan direction, scan length/sampling
rate and vertical units (kA vs. Mm). Measurement cursors are used to level plots,
obtain a variety of data, and/or to zoom in on a particular section of a scan profile. A
printer is built into the system for hard copies of screen scan profiles and data.
This manual will describe operation of this system in manual mode "only". For
information on programming the stage, semiautomatic and automatic operating modes, or
menu storage, please refer to the manufacturer's user operation manual available from the
staff in the cleanroom office.