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displayed in the usual manner.

 4.  Manipulating Data

      After the scan, the profile is plotted on the screen with a  summary  of  the  data
      displayed next to it.  For many applications,  this  initial  display  will  contain  all
      required  information.   When further analysis is needed, it can be performed in the
      instrument's computer  without having  to  re-scan.   If  the  profile  appears  tilted,
      proceed to Section 4.3 before taking any measurements.

4.1.  Overriding Vertical Auto-Ranges

To change the vertical range after the scan, press the RANGE  ^  or “down arrow”
key.  The range is indicated in the data summary, next to the label  VERT.   When
the  desired range  is  selected,  press  PLOT to redraw the image.  The profile  will
be  centered  vertically  where  it intersects  the  left cursor.  Some of the profile
may spill of the screen at higher magnifications.

 4.2.  Measurement Cursors - Measuring Profile Features

On the edges of the profile are  two  dashed  vertical lines.   These  are  the
measurement cursors, used to make horizontal  and  vertical  measurements  off  the
plot.  Cursor-derived measurement data is continuously displayed in the data
summary on the left side of  the screen.

The CUR button selects the cursor to  be  moved.   You can  see  the active cursor
indicator appear over each cursor in turn, and then over both as  you  repeatedly
press this button.  When both cursors are active, they will remain a fixed distance
apart as they move simultaneously.   The arrow buttons will move the cursor(s)
in the direction indicated.  Holding down  these  buttons  causes the cursors to
automatically speed up for long moves.

The cursors can be returns to the ends of the scan  by pressing  CUR  followed  by
ABT.  This also undoes all zooming (see below), returning to the  plot  displayed

          immediately after the scan.

Vertical measurements are shown in  the  data  summary under  the  heading
VERT.  Profile heights at the cursors  appear  directly   beneath   the   label.    The
highlighted  area  directly below shows the difference between the heights.  Thus to
measure a  step  height, simply  position  one cursor so that it intersects the
substrate at the base of the step.  Position the other so that it intersects the profile
on top of the step.  The vertical difference shown in the highlighted  area

          under VERT is the step height.

Horizontal measurements are shown in the data  summary under  the  heading
HORIZ.  Scan positions at the cursors  appear  directly   beneath   the   label.    The

Содержание AlphaStep 200

Страница 1: ...e scan as well as scan profiles and a summary of scan data The system has three operating modes manual for single scans semiautomatic for multi point scans and automatic for repeated multi point scans The system allows the operator to set and store if desired a variety of scan parameters such as scan direction scan length sampling rate and vertical units kA vs Mm Measurement cursors are used to le...

Страница 2: ...ed a plot of the scan is displayed along with pertinent data and information on the scan characteristics The cursors displayed on the plot are positioned by the operator to level the plot and or obtain the desired data The figure in the hard copy manual shows what the display looks like The following describes the data display as read from top to bottom ID Optional identifier for sample assigned b...

Страница 3: ...ple density specifications scan time scan direction stylus force and the vertical units 2 4 Keyboard There is a figure showing the keyboard in the hard copy manual A brief description of key functions follows For further information on using the keyboard see the detailed operating procedures in Section 3 ENT Enter Pressing this button will initiate terminate Enter Mode in which the operator can ch...

Страница 4: ... change as either the or down arrow key is pressed PLOT Used to zoom in on a section of a profile between the measurement cursors or to level a profile CUR This key and its associated and keys allow the operator to set scan direction and place the measurement cursors LEVEL Used to level the baseline of a profile TABLE The and down arrow keys will move the sample chuck up and down respectively PRIN...

Страница 5: ...een You should see your sample come into view and the stylus lower and come to rest on the surface of your substrate If you continue to press TABLE the stylus will retract Thus the TABLE button toggles the stylus between its fully retracted and lowered position Always retract the stylus when moving the sample 6 Use the zoom knob to adjust the magnification of your sample Use the stage arrow keys t...

Страница 6: ...data summary on the left side of the screen The CUR button selects the cursor to be moved You can see the active cursor indicator appear over each cursor in turn and then over both as you repeatedly press this button When both cursors are active they will remain a fixed distance apart as they move simultaneously The arrow buttons will move the cursor s in the direction indicated Holding down these...

Страница 7: ...lly located at the ends other scan If one cursor is on a surface feature higher or lower than the other cursor the substrate will appear tilted when the program makes both cursor heights equal The condition described above can be corrected by moving the leveling cursors to places on the profile where the heights are equal Ideally these should both be on the substrate near the ends of the scan alth...

Страница 8: ...e screen showing the entire profile press ABT This undoes all zooming but leaves the cursors at their most recent positions on the profile Pressing CUR then ABT undoes all zooming and returns the cursors to the ends of the scan 4 5 Average Difference Mode In Average Difference mode the system computes the difference between average height measurements When this mode is entered the currently displa...

Страница 9: ...y 4 6 Printing There are three available printing modes Screen in which the entire contents of the screen including the plot of the profile is printed Summary Data prints out only the data shown on the left side of the screen Data Send sends all data to the RS 232C serial output instead of the printer Screen and Summary Data print modes are used to make print outs on the internal printer or on the...

Страница 10: ...that the paper unwinds from underneath as it leaves the spool This is thermal paper if you do not have the correct side facing the printer nothing will be printed on the paper 5 Insert the paper underneath the rubber roller from behind This is easier if the end of the paper is cut so that it tapers to a point 6 The paper will emerge at the top of the rubber roller aiming back Pull out several inch...

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