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Furnace Reference Manual

Tempress Systems Inc.

Furnace manual

M320_01 January 2004

Содержание TS-12803

Страница 1: ...Furnace Reference Manual Tempress Systems Inc Furnace manual M320_01 January 2004...

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Страница 3: ...5 2 6 Fast Cooldown 2 6 2 7 Heating elements disposacore 2 7 2 7 1 Tube heating module 2 7 2 7 2 Heating elements tube adapters isolation collars 2 8 2 8 Support and sealing 2 10 2 9 Furnace temperatu...

Страница 4: ...ation 4 11 4 8 3 Paddle TC installation 4 11 4 8 3 1 Profile recipe selection 4 12 4 8 4 Automatic profiling RUN 4 12 4 8 5 Summary automatic profiling 4 13 5 Maintenance 5 1 5 1 Introduction 5 1 5 2...

Страница 5: ...inciple 2 6 Figure 2 5 Heating element for diffusion furnaces 2 8 Figure 2 6 Tube adaptors support and radiation heat shield 2 10 Figure 2 7 Zone paddle profiling thermocouple 2 11 Figure 2 8 Double s...

Страница 6: ...he following Tempress Diffusion models Model number Wafersize Capability Nr of tubes Flat zone length TS 6300 series TS 6303 TS 6304 150 mm 3 4 25 30 cm 12 inch TS 6600 series TS 6603 TS 6604 150 mm 3...

Страница 7: ...ers can be processed The TS 8000 series The TS 8000 series is a line of horizontal furnaces for up to 200 mm 8 inch wafers These systems are equipped with an accurate 5 zone digital controller for opt...

Страница 8: ...s an option Three phase power transformers are used to maintain a constant temperature with a minimum of disturbance on the mainpower distribution system The integrated modular construction provides d...

Страница 9: ...DESCRIPTION Figure 2 1 Outline drawing of a Furnace System model TS6804 FURNACE REFERENCE MANUAL 2 2...

Страница 10: ...the furnace C frontview of the furnace 8 Scavenger box exhaust 9 Tube switch 10 Key switch control power on off 11 Mainswitch lockable in off position 12 Mainpowerconnection 13 Excess Temperature Con...

Страница 11: ...used for OMEGA Juniors and all one stack furnaces B Same as A however with the provision that service now can be done from the maintenance room Each box provided with a separate outlet to the top of...

Страница 12: ...mised surface area The water quantity preferably soft water is 3 7 l min depending on the inlet water temperature see Figure 2 1 and Figure 2 3 The electrical fans on top of the module extract the hot...

Страница 13: ...at exchanger are both situated behind the heating elements Cooling Process Cool down is assisted by conditioned air that is forced to flow between the heating element and the process tube Figure 2 4 T...

Страница 14: ...ight Gauge for high low temperature applications Insulation made from high purity high density vacuum molded alumina silica fiber optional light Gauge It depends on the process temperature which kind...

Страница 15: ...mperature overshoot will highly increase the ageing of the heating element 2 7 2 Heating elements tube adapters isolation collars Kanthal heating elements are isolated with ceramic fiber material If t...

Страница 16: ...gh chemical resistance except liquid acids phosphoric acids and strong bases Moistening with water or oil doesn t influence the properties of ceramic fiber itself After drying respectively evaporation...

Страница 17: ...supports for high temperature elements is not recommended Radiation heat shield 1 per tube made of Moldatherm insulation plate and covered with an aluminium or stainless steel cover Tight sealing bet...

Страница 18: ...s Thermal flatzone is depending on the type of furnace Double spike thermocouples one for temperature control and one for the Excess Temperature protection Tripple thermocouples two are for the spike...

Страница 19: ...any damage before the furnace is unpacked If there is any visible damage notify Amtech Tempress Systems verbally and in writing This must be done within 24 hours after arrival of the shipment A forkl...

Страница 20: ...he customer s responsibility Check the bottom side of the furnace for levelers and sagged wires To prevent moving of the furnace during perpendicular lift up use wooden packing block Locate the furnac...

Страница 21: ...es to the exhaust system They must meet the state and local regulations for treatment and exhausting of the toxic corrosive and pyrophoric gasses The exhaust rate should be around 100 l min per tube l...

Страница 22: ...mplete system power down These red EMO buttons are placed on the upper front of the Remotes Control Console or loadstation and on the back of the furnace Optional 4 2 Start up Materials requirement Qu...

Страница 23: ...ure may be substantially affected by any airflow past the thermocouple junctions Place the tube adapters in the front and in the rear of the heating elements Check if the electrical connections on the...

Страница 24: ...st Cooldown For a pliable movement of the valves the pressure to close the valves in the manifolds needs to be adjusted between 1 and 2 bar Note More than 2 bar results in unnecessary high closing pre...

Страница 25: ...o soak for a minimum of 2 hours Reset the controller to 250C Turn off the tube power switch Allow to cool to ambient After cooling down 5 the system is now ready to operate the pre cleaned process tub...

Страница 26: ...e 4 3 Position of the thermocouple Disconnect the clamp spring of the thermocouple Withdraw the thermocouple Check at the inside of the heating element that when the process tube will be installed it...

Страница 27: ...traces of the acid and dried with dry nitrogen 2 In case of Sic process tubes Crystal and Paddles Some process tubes and liners may have a Zircon coating on the OD It is not recommended to wet clean t...

Страница 28: ...solution Once Si 3N4 is removed Si will quickly be etched out of the component malting it porous and weak The best approach is to leave a slight layer of Si3N4 Removal of Polysilicon Conservative Etc...

Страница 29: ...temperature outside the tube as measured by the spike TCs and the required power output Automatic profiling offers improved temperature control and more accurate temperatures during process 4 8 1 1 In...

Страница 30: ...ep that a different process recipe can be selected After starting the step numbers are executed sequentially The sequence can be interrupted by active branch or abort conditions An automatic or operat...

Страница 31: ...umn Do not forget to write to DTC after changing in TSC 2 For 20 minutes the temperature needs to be within these limits If the temperature falls outside the limits the timer is reset After 20 minutes...

Страница 32: ...will allow the DTC to use the paddle TC signals CAUTION The paddle TC consists of 3 5 TC wires in a ceramic tube covered by a quartz tube extreme care is required to prevent breakage b Secondly the p...

Страница 33: ...rofile Recipe xx and Wait for Temp to reach setpoint commands and verify the correct temperatures Adjust the recipe by adding or deleting the appropriate steps if so required d Store the recipe by exi...

Страница 34: ...ntrol zones c Start the PROFILE recipe using an approximate process load d Unload the wafers when finished e Unassign the Temperature Control Zones and remove the Profile TC if required f Read new pro...

Страница 35: ...binet at shelve tube level Remove outer panel at tube level by turning the DZUS fasteners at the left and right side of the panel Open tunnel in front of heating element in which the thermocouple wire...

Страница 36: ...element must be done as follows Adjustment of the base height through the front support mounted on the front and on the back of the heating element see figure Figure 5 1 Adjustment of the heating ele...

Страница 37: ...5 2 Connect the bolts on the heating element This must be done very carefully Use two box end wrenches when tightening the bolts on the power terminals of the heating element This action is necessary...

Страница 38: ...e When replacing a fanplate beware of the Swagelock tube fittings These have to be re tightened as follows The connections can be disconnected and re tightened many times The same reliable leak proof...

Страница 39: ...is strongly depending on the particle additions at processing In case the particles exceed the specifications the tube should be exchanged At every tube change the following has to be done 1 Cool the...

Страница 40: ...e engineer at the loadside can take the O ring from the tube Front flange must be cleaned 11 Gently pull the tube out of the system while the engineer at the loadside guides the tube out while lifting...

Страница 41: ...ion is still working check setpoints for each zone Check if the tube adapters are still properly fitting Check the process tube Check if the load doors if applicable are still in a good condition Chec...

Страница 42: ...with vacuum cleaner Clean lower electrical compartments with vacuum cleaner Check all wires on terminal strips on tightness Tighten all powercables with a wrench Tighten more than hand tight on eleme...

Страница 43: ...ce temperature isn t stable for more information see the DTC Technical Manual Adjustment of the Excess Temperature controller adjustment of the setpoint to the process temperature for more information...

Страница 44: ...t The touch panel will indicate the location of the problem For more information look at the controller manual 3 Temperature too low SCR is out of order fuse out of order Power failure 4 Temperature C...

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