SUSS MJB4, Руководство пользователя, Страница: 42 / 164

OPERATION OF THE
MJB4
32
MJB4 - Operation Rev02 01-06
3
3.6.2. Transmitted Light
3.6.2.1. Setting the Exposure Values
See section 1.3.3. "Setting Exposure Values".
3.6.2.2. Loading the Mask
See section 1.3.5. "Loading the Mask".
WARNING:
In order for all the processes to start,
the MAIN MENU must be selected and
the contact lever must be pressed!
3.6.2.3. Adjusting the Microscope with
IR Lighting
Setting the TSA Microscope
The split-field switch must be set to the middle
position for the M604 microscope and the lever for
the IR camera opening must be in the IR position.
Focusing the Mask Level
Coarse focusing is possible using the TSA Z motion
located behind the TSA microscope.
Set the fine focusing on the M604 microscope
separately. To do so, use the OBJECTIVE FOCUS
FINE MANUAL knob on the microscope.
Setting the TSA Microscope to the Mask Adjust-
ing Crosses
The right/left microscope is set to the right/left mask
adjusting crosses using OBJECTIVE X-
SEPARATION.
Unloading the Mask
To release the mask holder, remove both screws on
the right side of the mask holder frame. Take out the
mask holder and place it on a tray upside down.
Switch off the mask vacuum by pressing the
MASKVACUUM IS ON button.
The mask can now be removed.
IR Lighting Setting
The SETTINGS MENU must be selected in the
display and the lighting must be set to INFRARED
MICROSCOPE. The IR lighting arms are now set
precisely under the lenses.
Set the brightness using the left/right potentiometers
on the left front plate.
The left and right aperture diaphragms on the
microscope allow you to set the lighting on the left
and right separately.
Loading and Clamping the Mask Holder
With the top side facing up, the mask holder is
pushed into the adjusting station and then fasten in
the mask holder frame using the knurled screws.
3.6.2.4. Loading the Substrate
See section 1.3.6. "Loading the Substrate".
Press this button to display a description of the
individual procedure steps including the substrate
adjustment.
– Load the mask holder with mask,
– Pull out the slide and load the chuck,
– Place the substrate on the chuck,
– Insert the slide completely,
– Raise the substrate with the contact lever (WEC).
Caution!
The microscope pivots downward!
Setting the separation lever to the adjusting po-
sition
Never adjust the substrate if the mask
and substrate are in contact! Doing so
will damage the mask and substrate.
Experienced operators can use the contact lever
without first selecting the LOAD SUBSTRATE
button.