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WARNINGS AND SAFETY PRECAUTIONS
MJB4 - Warnings and Safety Rev02 01-06
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Light measurements on the exposure
chuck also require the use of UV-pro-
tective goggles.
UV-protective goggles must carry a marking indicat-
ing the protection class. The colour of the goggles
provides no indication of their protective effect!
1.5.5. Danger of Poisoning
1.5.5.1. Mercury Fumes following Lamp
Breakage
The biggest danger following a lamp explosion or
lamp breakage lies in the inhalation of the toxic mer-
cury fumes. Mercury can cause acute and chronic
poisoning.
Note:
The EU safety data sheets can be found
in the Appendix and must be read.
Advice on minimising health risks folowing a lamp
explosion:
• Leave the lamp house extractor switched on
(with powerful lamps)!
• Leave the contaminated room immediately!
• Ventilate the room well for at least 30 minutes!
• Do not open the lamp house for the time being.
Allow the interior of the lamp house to cool down
for at least 1 hour!
• Carry out lamp house decontamination using an
appropriate decontamination agent (see section
on changing the exposure lamp)!
• Follow the general and national safety regula-
tions relating to Hg!
• A doctor should be consulted immediately if there
is a possibility of mercury fumes having been in-
haled!
1.5.5.2. Generation of Ozone during the
Operation of the Lamp
Short-wavelength ultraviolet light can ionize the at-
mospheric oxygen.
An exposure lamp therefore generates ozone during
operation.
Long-term and intensive exposure to ozone can lead
to damage to the respiratory organs.
Where powerful lamps or special lamps
for deep-UV are used, additional ex-
traction and controlled cooling by
means of nitrogen flushing should be
ensured (see setting tables)!
If the stipulated settings are applied correctly, the
ozone concentration in the area surrounding the
lamp house should remain well below the permissi-
ble limit.
1.6. Working with the MJB4
Mask Aligner
Only SUSS MicroTec employees or qualified and
trained staff may service the machine.
The operating and starting voltages in
high-pressure lamps are deadly dan-
gerous!
The machine must be switched off be-
fore beginning servicing work on the
lamp house or other electrical compo-
nents!
1.6.1. Fitting, Changing and Cool-
ing the Exposure Lamp
When working with high-pressure lamps, the appro-
priate safety regulations and service life specifica-
tions of the lamp manufacturer must be observed.
Hg-filled UV high-pressure lamps must be changed
once the service life specified by the manufacturer
has expired. There is an increased risk of lamp ex-
plosion after this date!
Premature failure of a lamp can be the result of in-
correct lamp cooling (too powerful or too weak), in-
correct power setting, soiling of the lamp tube or
similar.
Exposure lamps should only be handled with gloves.
Clean any grease marks with alcohol!
1.6.1.1. Danger of Lamp Explosion
If the Hg high-pressure lamps are operated accord-
ing to their specification (type selection on CIC, cool-