SUSS MJB4, Руководство пользователя, Страница: 41 / 164

OPERATION OF THE
MJB4
MJB4 - Operation Rev02 01-06
31
3
Setting the separation lever to the adjusting po-
sition
Never adjust the substrate if the mask
and substrate are in contact! Doing so
will damage the mask and substrate.
Experienced operators can use the contact lever
without first selecting the LOAD SUBSTRATE
button.
3.6.1.4. Adjusting the Microscope
Setting the TSA Microscope
The split-field switch must be set to the middle
position for the M604 microscope and the lever for
the IR camera opening must be in the IR position.
The left/right camera frame or the split field can be
set in the SETTINGS MENU (see section 3.2.4).
Microscope Lighting
Connect the microscope optical fiber to the IR light
source (lighting 3+4) in order to switch the lighting to
INFRARED MICROSCOPE in the display.
Set the brightness using the left/right potentiometers
on the left front plate.
Make separate lighting settings for right/left using
the right/left aperture diaphragms on the
microscope.
Focusing the Mask Level
Coarse focusing is possible using the TSA Z motion
located behind the TSA microscope.
Fine focusing is separately set on the M604
microscope. To do so, use the OBJECTIVE FOCUS
FINE MANUAL knob on the microscope.
Setting the TSA microscope to the Mask Adjust-
ing Crosses.
The right/left microscope is set to the right/left mask
adjusting crosses with OBJECTIVE X-
SEPARATION.
3.6.1.5. Adjusting the Substrate
Focusing the Substrate Level
For fine lens adjustment, use the OBJECTIVE
FOCUS FINE MANUAL knob on the microscope.
Adjustment (menu in the SUBSTRATE ADJUST-
MENT display)
Use the X, Y and theta micrometer screws on the
adjusting table for this. Adjust the substrate
adjusting crosses so that they are central-
symmetrical to the mask adjusting crosses.
Never adjust the substrate if the mask
and substrate are in contact! Doing so
will damage the mask and substrate.
Checking the Adjustment
See section 1.2.7. "Buttons in the Display / Touch
Screen".
3.6.1.6. Exposure
Once the substrate is adjusted and brought to the
exposure position using the SEPARATION LEVER,
press the EXPOSE button to perform the exposure.
You must press YES again on the display to confirm
the exposure.
If you press NO or use the CONTACT or
SEPARATION LEVER, the sequence is initiated
with the shutter closed. The substrate can now be
unloaded or readjusted.
Caution!
Microscope in motion!
3.6.1.7. Unloading the Mask
To release the mask holder, remove both screws on
the right side of the mask holder frame. Take out the
mask holder and place it on a tray upside down.
Switch off the mask vacuum by pressing the
MASKVACUUM IS ON button.
The mask can now be removed.