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WARNINGS AND SAFETY PRECAUTIONS
MJB4 - Warnings and Safety Rev02 01-06
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1
MicroTec's service to carry out a check!
Note!
In addition, in order to achieve good ex-
posure results, the evenness of the
light should be adjusted after fitting a
new lamp.
1.6.1.4. Lamp Housing Extraction
As a rule, no suction is required for 200W and 350W
lamps.
Ozone extraction from the lamp housing must be en-
sured for the 500W DUV Hg/Xe lamp in the 350W
lamp housing to avoid health risk. Add-on kit item no.
189553 is required for this purpose.
Detailed values can be found in the table "Set-
ting values for lamp cooling and lamp house ex-
traction" in section 1.1. "Prerequisites for
Installation"
.
1.6.1.5. Disposal
Used lamps should also only be stored and trans-
ported in the original protective packaging!
UV high-pressure lamps contain up to 1g of highly-
toxic mercury.
These lamps should therefore be treated as special-
category waste.
Local regulations on disposal should be observed.
It is possible to return the lamps to the supplier or
manufacturer.
1.6.2. Preparing the Machine for
Working
Check that the vibration-insulated table (if present)
is working.
Caution!
In the event of a loss of pressure, the ta-
ble can drop and trap the fingers!
1.6.2.1. Preparing to Switch ON
The following instructions assume that the mask
aligner has been correctly installed and that the ma-
chine has been connected to the power supply net-
work by switching on the main power switch.
The following pressure values should be present on
the machine:
• Compressed air
5,5 - 7 bar (COMPRESSED AIR)
• Nitrogen
2 - 3 bar (NITROGEN)
• Vacuum
-0.8 bar (means 0.2 bar absolute (VACUUM))
1.6.3. Safety Checks
The important safety functions of the machine
should be checked for safe functioning at regular in-
tervals - i.e at least every three months.
This applies as long as the check itself does not rep-
resent a hazard.
The following should be tested:
• that the machine stops immediately after the
Emergency Off switch is operated,
• acoustic warning signal by the power supply unit
in the event of a failure in the nitrogen supply -
only very brief for test purposes!