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WARNINGS AND SAFETY PRECAUTIONS
MJB4 - Warnings and Safety Rev02 01-06
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1. W
ARNINGS AND
S
AFETY
P
RECAUTIONS
1.1. Guidelines on Safety at
Work
This machine has been developed and manufac-
tured in compliance with the current safety regula-
tions and standards.
This operating manual should be read before using
the mask aligner. It contains all the information re-
quired for the safe and correct use of the machine.
Other operating manuals included with this manual
must also be read, for ballasts CIC1200, CPC200
and CPC350.
As a further precaution against accidents, the oper-
ating and service personnel should be trained and
instructed on delivery and at regular intervals, other-
wise communication problems and misinter-preta-
tion of the operating manual can lead to injury to the
operator.
SUSS MicroTec cannot accept any responsibility for
physical injury or damage to the machine which re-
sults from incorrect use of this machine and failure
to follow these safety instructions.
Warning!
The instructions in this operating man-
ual are only intended for qualified per-
sonnel. The machine may only be
operated by persons who are autho-
rized and trained to do so!
1.2. Definition of Danger
Advice and Warnings
The dangers which can possibly arise during opera-
tion of this machine as well as appropriate precau-
tionary measures and recommended procedures
are described in this section of the manual - as well
as in warnings which are applied to the machine or
its assemblies or in some cases to the packaging.
Both types of warning must be understood and ob-
served by theMJB4 operator of the machine. Warn-
ings are normally divided into
• a description of the possible hazard
• directions on avoidance of the danger or on the
correct procedure to be followed in the event of
danger.
A warning or instruction symbol appears next to the
warning.
Warnings on the machine also include the key words
Danger or Warning:
• "Danger" indicates a potentialy serious risk to life,
• "Warning" indicates a risk of injury.
1.3. Intended Use of this Ma-
chine
The machine is exclusively intended for use as an
alignment and/or exposure device for substrates
used in semiconductor and microsystem technolo-
gy.
Any other form of use must be agreed on with SUSS
MicroTec Lithography's Engineering Product Sup-
port department. In the event of contravention,
SUSS MicroTec accept no liability either for mal-
function or for personal injury.
1.4. Main Switch with
Emergency Off Function
The machine has a main switched combined with an
emergency off function. If the switch is turned to
OFF, the machine is immediately cut off from the
power supply network, the exposure lamp goes off,
and the upper microscope pivots upwards. The
switch is signal red and is located on the left front
plate.
In case of danger, turn the main switch
to OFF!
Warning!
The upper microscope pivots upwards.