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Table of Contents
SMFS-U-CM-110
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Table of Contents
1 Information on this manual ................................................................... 5
Structure of the warnings.............................................................. 5
Structure of the operating instructions .......................................... 6
For better orientation .................................................................... 6
Intended use ................................................................................. 7
General safety instructions ........................................................... 8
Specific safety instructions ........................................................... 8
Tasks and duties of the operating company ................................. 9
Personnel qualification................................................................ 10
Personal protective equipment ................................................... 11
Overview..................................................................................... 12
Function ...................................................................................... 13
Technical Data............................................................................ 13
Type plate ................................................................................... 14
Spare and wear parts ................................................................. 16
4 Transport and storage ......................................................................... 17
For your safety............................................................................ 17
Transport .................................................................................... 17
Storage ....................................................................................... 17
For your safety............................................................................ 19
Initial commissioning................................................................... 20
Particle counter........................................................................... 21
5.3.1 Operation ......................................................................... 22
5.3.2 Entering the purity level ................................................... 24
5.3.3 Evaluating the measurement data ................................... 27
For your safety............................................................................ 28
Starting the pumping process ..................................................... 29
Stopping pumping....................................................................... 29
For your safety............................................................................ 30