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Spectra MKS Cirrus LM99, Руководство пользователя

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Cirrus SP101013.111 – 10 October 2012 

MKS Instruments UK Ltd., Spectra Products 

 

58 

9.6 Filament Plate (PVD ion-source)   

 

 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 

 

Item  Description 

(Dimensions in mm)

  Part Number 

1 

Screw M1.6x3  

200901603 

2 

Barrel Connector 

305040434 

3 

Screw M2x4 

200902004 

4 

Filament Plate Tungsten Fils 

842-060 

4 

Filament Plate Thoria Fils 

842-002 

1 

2 

 

3 

 

3 

 

4 

 

5 

 

Содержание MKS Cirrus LM99

Страница 1: ...Cirrus LM99 User Manual SP101013 111 October 2012...

Страница 2: ...roducts Cowley Way Weston Road Crewe Cheshire CW1 6AG United Kingdom 44 0 1270 250150 Tel International 44 0 1270 251939 Fax International Or email manual_info mksinst com MKS Products provided subjec...

Страница 3: ...e equipment named above has been designed to comply with the relevant sections of the above referenced specifications The unit complies with all essential requirements of the Directives Signed J M Hig...

Страница 4: ...ns If extension cables are required they must be supplied by MKS Instruments Ltd 4 Cables attached to the analog and digital IO ports must have a maximum length of 3 meters The Ethernet cable has a ma...

Страница 5: ...ents are EMC and safety critical and must not be substituted Replacement parts are available from MKS Instruments Spectra Products Ltd 4 Equipment enclosures embody certain special fastenings and bond...

Страница 6: ...eater 16 System Heater 16 Emission 16 Comms 16 Capillary Inlet 16 4 2 The rear panel 17 RGA Comms 18 Power 18 Analog I O 18 Digital I O 19 Exhaust Purge IN OUT 20 5 Installation 21 5 1 Default IP Addr...

Страница 7: ...ecks 45 8 5 Checking filaments 46 8 6 Changing filaments 47 8 6 1 Removing the filaments 47 8 6 2 Fitting new filaments 48 8 7 Ion Source cleaning 49 8 8 Cleaning or replacing the ion source 50 8 8 1...

Страница 8: ...October 2012 MKS Instruments UK Ltd Spectra Products 8 Software Operation 72 13 2 UDV 73 Location of key components 73 Before you begin 74 Connections 74 Check Baratron Zero 75 Setting the UDV Basics...

Страница 9: ...rical Power Inlet 100 to 120 VAC rms 47 63Hz 6 3A rms 200 to 240 VAC rms 47 63Hz 3 15A rms Installation category over voltage category II to IEC664 Insulation Class I to IEC536 1 3 Fuses Located on re...

Страница 10: ...r specified in these instructions 1 6 Connectors The connectors for external circuits are for use only with MKS Spectra equipment or equipment which has no accessible hazardous live parts The external...

Страница 11: ...Caution Risk of danger On the connections panel refers to a Read all instructions carefully before use b The control unit and signal ports are designed for connection to MKS Spectra accessories via M...

Страница 12: ...n excess of 18kg and should therefore be moved by at least two people To avoid muscle strain and or back injury movers should employ lifting aids and the correct lifting techniques 1 8 Ventilation Ope...

Страница 13: ...ump that backs the turbo pump also serves as a by pass pump for the capillary inlet Because the Cirrus is based around the Microvision IP RGA the unit operates with the same Process Eye software as th...

Страница 14: ...ed a PC this will be shipped in a separate box If there has been obvious damage during shipment or if there are items listed on the packing slip which have not arrived immediately contact your local M...

Страница 15: ...s 15 4 Connections and Indicators 4 1 The front panel Along with the capillary inlet the front panel incorporates a bank of six status indicators to assist in the operation of the Cirrus The colour an...

Страница 16: ...cator is amber when the capillary heating element is on System Heater The indicator is amber when the heater temperature is set to 80degC Heat and red when at the 180degC setting Bake Please see Secti...

Страница 17: ...nal connections required by the Cirrus as well as exhaust purge connections The diagram above illustrates a standard configuration On externally backed systems ancillary connections are present A desc...

Страница 18: ...analog output 0 to 10V Four quasi differential analog inputs 0 to 10V with a maximum voltage on the return of 0 5V 15V power outputs both fused at 100mA fuses are not self resetting Analog Connector p...

Страница 19: ...imum cable lengths The Digital I O port provides Two 8 bit bi directional ports One interrupt strobe input 5V fused at 100mA 15V fused at 100mA Pin Description Notes 1 H1 interrupt strobe 2 PA1 3 PA3...

Страница 20: ...c pressure to the IN port to improve detection levels Connect a second pipe to the port labeled OUT to exhaust the dry nitrogen safely The exhaust nitrogen may now contain corrosive toxic gases Exhaus...

Страница 21: ...lied with a default IP address of 192 168 0 250 and a subnet of 255 255 255 0 This may need to be changed if you intend to connect the Cirrus to your company network for example 5 2 Changing the IP Ad...

Страница 22: ...Once the cover has been removed locate the preset and reset buttons located on the top left hand side of the main PCB With power applied to the Cirrus press the reset button and immediately press and...

Страница 23: ...ng up Switch on the Cirrus The internal cooling fans will start but none of the pumps should be running the only indicators lit on the front panel should be Power and a blinking Comms Led This is due...

Страница 24: ...tober 2012 MKS Instruments UK Ltd Spectra Products 24 Clicking on the Cirrus tab allows control of the unit To start the unit pumping click the Pump button Once the turbo pump is up to speed the indic...

Страница 25: ...t to use the system properly it will need to be run for sufficient time to allow the background peaks to drop This amount of time can be significantly reduced by baking the system This should be done...

Страница 26: ...hould be baked again 6 5 Temperature Settings The Heat Bake option should be set to Bake for the initial bake out to reduce the water background After this period running at the lower temperature of H...

Страница 27: ...of time or it needs to be shut down for maintenance To shut down the Cirrus 1 Switch off the Capillary and System heaters 2 Switch off the quadrupole filaments 3 Wait 10 minutes to allow the filament...

Страница 28: ...perations 7 1 Removing the Cover Before removing any of the Cirrus covers ensure the unit is disconnected from the mains supply and has had adequate time to cool To remove the outer cover remove the t...

Страница 29: ...removing the oven top plate ensure the oven has had adequate time to cool after baking To remove the oven plate remove the eight Philips screws and lift the plate clear of the oven Backing Bypass Pump...

Страница 30: ...s MKS Spectra produce a variety of capillary inlets but the Flexil capillary is dealt with in this manual The Flexil capillary inlet assembly consists of a white PTFE tube containing a fine bore stain...

Страница 31: ...nut and then the ferrule onto the silica tubing as shown in the picture above 8 Thread the fused silica tube into the Swagelok reducer and continue until you feel it butt up against the vacuum chambe...

Страница 32: ...the end of the quadrupole vacuum chamber opposite to the analyser flange The flange is held in place by eight M8 stainless steel bolts The analyser in your Cirrus will almost certainly be fitted with...

Страница 33: ...nner remove the eight bolts which secure the CF inlet flange to the vacuum chamber Gently free the inlet flange from the chamber and slide out the bypass line through the oven wall You can now see the...

Страница 34: ...the inlet 8 Remove the retaining plate and ceramic coupling from the inlet flange The ceramic coupling and retaining ring are held in place on the inlet flange by three springs fixed to threaded grub...

Страница 35: ...A Tool Guide The Tool Guide is fixed to the inlet flange using the three screws supplied replacing the ceramic coupling assembly and acts as the name suggests as a guide for either the removal or inse...

Страница 36: ...e to the inlet flange using the three screws supplied 7 6 Removing the Orifice Disk Insert the Removal Tool into the guide and push the tool into the orifice disk Press firmly until the tool bottoms a...

Страница 37: ...e Orifice Disk use tweezers gently as not to deform or scratch the disk Offer the new disk to the tapered hole in the inlet flange this should be done with the Tool Guide removed as the disk needs to...

Страница 38: ...ill be felt as the disk seats into position There should be a slight gap between the shoulders of the tool guide and the insertion tool Once the disk has been pushed fully home remove the Insertion To...

Страница 39: ...7 8 Re assembling the Inlet Flange 1 Re fit the springs to the Inlet Flange ensuring that they are not cross threaded and inserted until the uppermost face of the grub screw is flush with the face of...

Страница 40: ...ly around the shoulder of the Ceramic Coupling 5 Clean all handled parts with a suitable solvent and re fit the Inlet Flange to the chamber using a new copper gasket by firstly sliding the bypass conn...

Страница 41: ...splay to the outside world 4 The flanged housing This is the only part of your analyser that you will see under normal operating conditions Comprising of an industry standard 2 75 Conflat flange with...

Страница 42: ...HE FILTER ASSEMBLY BE DISMANTLED IF YOU ARE IN ANY DOUBT WHEN SERVICING YOUR ANALYSER PLEASE CONTACT YOUR LOCAL SERVICE CENTRE 8 2 Removing the Analyser Ensure the Cirrus is disconnected from the main...

Страница 43: ...hich fasten the CF35 flange of the analyser to the vacuum chamber 5 Carefully withdraw the analyser from the vacuum chamber Leave the old copper gasket in place until you are ready to fit the new one...

Страница 44: ...he analyser in place of the old one 3 Carefully insert the analyser into the vacuum chamber trying not to let the leads touch the wall of the vacuum chamber Make sure the gasket does not slip out of i...

Страница 45: ...ous problem or more likely a faulty meter meter leads If after checking your meter an open circuit still exists contact your nearest MKS Spectra service center for advice 3 Move the lead from the flan...

Страница 46: ...value of 1mA The current flow through the filament is increased until the value of emission current is reached If however the control electronics reaches the limit of its filament current supply capab...

Страница 47: ...ent is supplied with a tool kit that contained some of the things you will need small jewelers screwdriver 2mm pair of tweezers small pair of smooth jawed needle nosed pliers pair of clean cotton glov...

Страница 48: ...ir formation If these oxides are present it is recommended that you refer to the section on source removal and cleaning before proceeding see Section 7 5 8 6 2 Fitting new filaments The fitting of new...

Страница 49: ...eedle nosed pliers Pair of clean cotton gloves Clean bench on which to work Ohmmeter Clean container in which to put small parts Ultra sonic bath Measuring cylinder Iso propyl alcohol Some method of h...

Страница 50: ...of the ion source as one complete assembly which can be replaced or dismantled for cleaning The ion source automatically aligns on the main analyser assembly allowing easy replacement without the need...

Страница 51: ...ase ensure that you have the correct Source Alignment Jig and spare ceramics and screws available Refer to the exploded views of the Source Assembly shown on Page 37 Open or 40 PVD 1 Carefully unscrew...

Страница 52: ...the repeller plate so the circular cutouts align with the two visible barrel connectors and slide it down the wires over the ceramic tubes and onto the ceramic washers 7 Place one ceramic washer over...

Страница 53: ...cts 53 9 Exploded Views 9 1 Analyser Flange pin outs Pin Descriptions Pin Connection 1 Earth 2 Source plate 3 Electron Multiplier 4 Filament 1 5 Extraction plate 6 Suppressor plate 7 RF 1 8 Repeller p...

Страница 54: ...ed view of the Analyser Open ion source shown Item Description Dimensions in mm Part Number 1 Source Assembly Tungsten Fils 842 021 1 Source Assembly Thoria Fils 842 022 1 PVD Source Assembly Tungsten...

Страница 55: ...t Plate open ion source Item Description Dimensions in mm Part Number 1 Screw M1 6 x 3 3 off 200901603 2 Barrel Connector 305040214 3 Screw M2 x 4 200902004 4 Filament Plate Tungsten Fils LM508 015PL...

Страница 56: ...sembly open ion source Item Description Dimensions in mm Part Number 1 Plain Washer SS M1 6 27031600 2 Screw M1 6 x 8 200901608 3 Ceramic Tube 2 8D x 3 5L 400020035 4 Ceramic Washer 4 7D x 1L 40001020...

Страница 57: ...act Plate open ion source Item Description Dimensions in mm Part Number 1 Plain Washer SS M1 6 27031600 2 Screw M1 6 x 6 200901606 3 Ceramic Tube 2 8D x 2L 400020020 4 Ceramic Washer 4 7D x 1L 4000102...

Страница 58: ...ctra Products 58 9 6 Filament Plate PVD ion source Item Description Dimensions in mm Part Number 1 Screw M1 6x3 200901603 2 Barrel Connector 305040434 3 Screw M2x4 200902004 4 Filament Plate Tungsten...

Страница 59: ...mber 1 Ceramic Washer 1 0L 400010202 2 Screw M1 6x8 200901608 Plain Washer for above screw 270316000 3 Ceramic Tube 5 1L 400020051 4 Repeller Plate Assembly LM504 063PL 5 Source Plate Assembly LM504 0...

Страница 60: ...the orientation of the source assembly when inserted into the jig Align the extract plate s barrel connector with the alignment indicator on the jig Remove the source by pushing it out from the bottom...

Страница 61: ...er LED illuminated Is unit visible in Device Manager Check network link status Has the host an IP address Check patch cable and x over adaptor Replace patch cable and x over adaptor Verify network con...

Страница 62: ...led The following paragraph explains the procedure Open Windows Control Panel and select the NETWORK CONNECTIONS icon Choose the network connection you are using for the link with the instrument right...

Страница 63: ...etwork connection you are using for the link with the instrument right click and choose PROPERTIES Highlight the INTERNET PROTOCOL TCP IP entry from the list and click on the PROPERTIES button The fol...

Страница 64: ...the link with the instrument right click and choose PROPERTIES Highlight the INTERNET PROTOCOL TCP IP entry from the list and click on the PROPERTIES button The default IP address of the instrument i...

Страница 65: ...rument differs from the IP address of the host computer In this example the host PC will not be able to communicate with the instrument while the two IP addresses are in different ranges There are two...

Страница 66: ...IP address of the instrument and the IP address of the host computer are in the same IP range In the above case communication between the host PC and the instrument is possible though Device Manager...

Страница 67: ...e instrument to its default IP address of 192 168 0 250 carry out the following procedure Power on the unit Press the RESET button and immediately press and hold the PRESET button for 20 seconds Impor...

Страница 68: ...serial numbers date of purchase and a detailed fault description Complete the relevant sections of the Health and Safety Returns Form on pages 67 and 68 of this manual This form MUST accompany the in...

Страница 69: ...ation before we receive the equipment A copy should also be given to the carrier FAILURE TO COMPLETE THIS FORM OR COMPLY WITH THE PROCEDURE WILL LEAD TO DELAYS IN SERVICING THE EQUIPMENT Please Comple...

Страница 70: ...these substances Action to be taken in the event of human contact or spillage I hereby confirm that the only toxic or hazardous substances that the equipment specified above has been in contact with a...

Страница 71: ...Optional Hardware 13 1 Multi stream Inlet The Multi stream Inlet allows the independent sampling of four or eight streams depending on the option chosen Connecting the sample lines The valve is suppli...

Страница 72: ...td Spectra Products 72 Software Operation Control of the inlet and therefore which line is chosen for sampling is done via the Cirrus control tab Clicking on the Selected Valve pull down opens a list...

Страница 73: ...C Control Unit in conjunction with an MKS Baratron gauge with a 10V output at 0 1mBar There may be other types of gauge used in the future so adjust your calculations accordingly This procedure detail...

Страница 74: ...fully closed DO NOT OVERTIGHTEN The Cirrus should be powered up and pumping the RGA s filaments should be OFF Zero all front panel controls on the UDV Controller Connections Connect the 3 core Baratro...

Страница 75: ...arm up time for the Baratron to settle before moving on With the UDV fully closed your meter should read zero volts If it does not then the Baratron must be zeroed which can be done at the fine adjust...

Страница 76: ...ical adjustment Simply turning the Limit adjustment to full current would be the same as over tightening a manual valve Set the switch indicated to the Limit position Slowly adjust the Limit control w...

Страница 77: ...V output of the Baratron Check page 35 of the Operator Manual which describes the process of fine tuning the gauge using the Proportional Gain and Reset Time adjustments Once correctly set up a sample...

Страница 78: ...UDV See the UDV Manual page 16 Sections 3 2 and 3 3 for details on when and how to bake the valve The Cirrus chamber has a built in heater which can be used to bake the valve at 180C or to run the val...

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