Cirrus SP101013.111 – 10 October 2012
MKS Instruments UK Ltd., Spectra Products
30
Turbo Molecular Pump
The turbo pump utilizes a “wet bearing” and must be serviced yearly to avoid premature failure of the
pump.
Diaphragm Pump
Diaphragm replacement must be carried out on a yearly basis to avoid premature failure of the pump.
MKS can supply you with a kit of replacement diaphragms and a lubricant reservoir, if you would prefer
not to carry out the work yourself, service contracts are available. Contact your nearest MKS facility for
details.
RGA Electronics (Microvision IP)
There are no user serviceable parts within the RGA electronics package.
Capillary Inlet
Before carrying out ANY operations that involve the capillary system, take precautions to
prevent contact with any hazardous substances that may have been sampled.
Allow all parts of the inlet and oven to cool before commencing.
The Cirrus system uses a capillary inlet to admit sample gas into the chamber for analysis. MKS Spectra
produce a variety of capillary inlets but the Flexil capillary is dealt with in this manual.
The Flexil capillary inlet assembly consists of a white PTFE tube containing a fine bore stainless steel
tube, down the centre of which is threaded a 0.32mm I.D. fused silica tube.
A low voltage power supply is connected across the stainless steel tube to provide heating of the fused
silica tube.
You may need to replace the fused silica capillary tube which forms part of the capillary inlet assembly,
if it has been damaged or becomes blocked.
1. Shut down the Cirrus by following the instructions in Shutting Down then disconnect from the
mains supply. Remove the outer cover.
2. Disconnect the high pressure end of the capillary from the gas source. If there is a shut off valve,
remember to close it.
3. Remove the oven lid.
4. In the oven compartment, use a 5/16 inch spanner to undo the nut on the inlet flange and slide it,
and the ferrule, along the fused silica tube towards the front of the oven.
5. Carefully slide the
fused silica tube
down the capillary
assembly away from
the inlet flange and
remove the nut and ferrule. Once the fused silica capillary appears at the
