Cirrus SP101013.111 – 10 October 2012
MKS Instruments UK Ltd., Spectra Products
33
5. Using both a 5/8” and ¾” spanner, separate the bypass joint on the cold side of the oven.
6. Using a ½” spanner, remove the eight bolts which secure the CF inlet flange to the vacuum
chamber. Gently free the inlet flange from the chamber and slide out the bypass line through the oven
wall.
You can now see the ceramic coupling, which sits over the PVD inlet of the quadrupole.
In order to use the
orifice disk insertion
and removal tools, this
coupling must be
removed from the inlet
flange.
