Cirrus SP101013.111 – 10 October 2012
MKS Instruments UK Ltd., Spectra Products
42
surrounding source plates, layers of metal oxides are deposited. Being insulators, these have a far
more noticeable effect upon the performance of the source and therefore a more frequent cleaning
program should be adopted.
CAUTION
THE QUADRUPOLE’S FILTER IS ACCURATELY
ALIGNED BY
SKILLED PERSONNEL USING
SPECIALIST TOOLS AND JIGS.
UNDER NO CIRCUMSTANCES SHOULD THE FILTER ASSEMBLY
BE DISMANTLED.
IF YOU ARE IN ANY DOUBT WHEN SERVICING YOUR ANALYSER,
PLEASE
CONTACT YOUR LOCAL SERVICE CENTRE.
8.2 Removing the Analyser
Ensure the Cirrus is disconnected from the mains supply, the turbo has stopped and the
oven has had adequate time to cool.
1. Slacken the locking ring using a suitable sized Allen key.
2. By holding the front panel of the Electronics Package, carefully slide it free of the analyser.
3. Make a note of the orientation of the analyser with respect to the vacuum chamber. Use the locking
pip on the analyser flange as a reference (it will usually be in the 12 o'clock position).
Electronics Package
