IZS40/41/42
Series
Refer to page 6 for “Models and Functions.”
Air covers the emitter.
Emitter
¡
Minimizes the contamination of
emitters by discharging compressed
air at the surface of the emitters
¡
2 types of emitter materials
Assist air amplified by the sucking in of ambient air (the ejector effect) allows for highly
efficient static neutralization through the efficient transfer of the produced ionized air.
Energy saving high-efficiency cartridge
¡
Select from “Manual Operation” mode,
which performs adjustment only when
connected, and “Automatic Operation”
mode, which continuously performs
adjustment while connected.
Workpiece
Detects and adjusts the offset
voltage around workpieces
30
0
−30
Offset voltage [V]
Time
Effect of auto balance sensor (Image)
Sensor not connected
Sensor connected
Continuously controls offset
voltage around workpieces
Tungsten/Single crystal silicon (for silicon wafers)
Tungsten
(Emitter cartridge color: White)
Single crystal silicon
(Emitter cartridge color: Gray)
Flow rate consumption
Ambient
air suction
Discharge
flow rate
The ejector effect allows
for highly efficient static
neutralization.
500
400
300
200
100
0
0
200
400
600
800
1000
1200
1400
Installation distance [mm]
Flow rate [L/min (ANR)]
Flow rate for installation distance of each cartridge
Conditions: IZS41-1120
(Number of cartridges: 18 pcs.), Discharge time 1 s
High speed static neutralization
Energy saving
static neutralization
Energy saving
high-efficiency
Nozzle with
built-in ejector
4
