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The potential amplitude of the workpiece is reduced by means of dual AC.

Dual AC Type

IZS42

Series

Rapid static neutralization by a feedback sensor

Feedback Sensor Type

IZS41

Series

Simple operation: Can be controlled by powering the ionizer ON

Standard Type

IZS40

Series

1 IZS42 installation height: 300 mm

2 Conditions: With feedback sensor, Discharge time from 1000 V to 100 V

Object to be neutralized: Charged plate (150 mm x 150 mm, Capacitance 20 pF)

Installation distance: 200 mm (Tungsten emitter with air purge)

Potential amplitude:

or less

Rapid static neutralization: Fastest time

0.1

Ionizer

RoHS

Energy saving
high-efficiency
cartridge

IZS40/41/42

Series

CAT.ES100-97C

Содержание IZS40

Страница 1: ...r ON Standard Type IZS40 Series 1 IZS42 installation height 300 mm 2 Conditions With feedback sensor Discharge time from 1000 V to 100 V Object to be neutralized Charged plate 150 mm x 150 mm Capacita...

Страница 2: ...neration frequency 30 Hz Supply pressure 0 1 MPa High speed static neutralization cartridge For the static neutralization of glass substrates For the static neutralization of electric substrates Dual...

Страница 3: ...ck Sensor Type IZS41Series Feedback sensor Detects the polarity of the object to be neutralized and measures the charged voltage Stop Ion emission waveform Operating mode Energy saving mode Continuous...

Страница 4: ...maintained at a constant value This is achieved by monitoring the ions emitted from the ionizer using the ground line and adjusting the and ion supply rates Adjustment and maintenance labor can be red...

Страница 5: ...d 30 0 30 Offset voltage V Time Effect of auto balance sensor Image Sensor not connected Sensor connected Continuously controls offset voltage around workpieces Tungsten Single crystal silicon for sil...

Страница 6: ...cover For increased cartridge drop prevention When attached to the body From the 7th ionizer To the 3rd ionizer Transition wiring cable To POWER for the 2nd ionizer 8th ionizer 2nd ionizer 1st ionize...

Страница 7: ...ter cartridge type Remote controller AC adapter Drop prevention cover Cleaning kit Series AC DC IZS40 AC Sensing AC DC IZS41 Dual AC IZS42 Series IZS40 IZS41 IZS42 Accessories sold separately per seri...

Страница 8: ...ion of finished goods For the static neutralization during wafer transfer Prevents breakage due to discharge between wafers and hands For the static neutralization of packing films Prevents the filled...

Страница 9: ...p 14 How to Order p 15 Made to Order p 16 Specifications p 17 Construction p 17 Accessories for Individual Parts p 18 Accessories Sold Separately p 19 Wiring IZS40 p 20 Connection Circuit IZS40 p 20...

Страница 10: ...0 0 50 150 100 200 Discharge time s Installation distance mm 10 8 6 4 2 0 0 500 1500 1000 2000 Discharge time s Installation distance mm 0 1 MPa 0 5 MPa 0 2 MPa 0 3 MPa 0 4 MPa 10 8 6 4 2 0 0 500 1500...

Страница 11: ...er horizontal direction mm 0 50 100 150 200 250 300 150 100 50 0 50 100 150 150 100 50 0 50 100 150 5 s 2 s 1 s 0 5 s Installation distance in height from ionizer to workpiece Charged object location...

Страница 12: ...0 50 0 50 100 150 200 250 Installation distance in height from ionizer to workpiece Charged object location mm Ionizer front back direction mm 5 s 2 s 1 s 0 5 s 0 50 100 150 200 250 300 150 100 50 0 5...

Страница 13: ...00 250 300 150 100 50 0 50 100 150 150 100 50 0 50 100 150 Installation distance in height from ionizer to workpiece Charged object location mm Ionizer horizontal direction mm 5 s 2 s 1 s 0 5 s 3 Ener...

Страница 14: ...al amplitude V Installation distance mm 0 50 25 100 75 150 125 175 200 0 500 1000 1500 2000 Potential amplitude V Installation distance mm 0 1 Hz 30 Hz ePotential Amplitude High speed static neutraliz...

Страница 15: ...ure measurement 10 mm Pressure measurement Air supply measurement 10 mm 10 mm 10 mm Pressure measurement 10 mm Air supply measurement High speed static neutralization cartridge Energy saving high effi...

Страница 16: ...ion cartridge Tungsten C Silicon J Energy saving static neutralization cartridge Tungsten K Silicon V Energy saving high efficiency cartridge Tungsten S Silicon e Bar length Symbol Bar length mm Symbo...

Страница 17: ...revention cover available as an option 520 1000 1420 1780 2140 700 1060 1480 1840 2200 760 1180 1540 1960 2260 880 1240 1660 2020 2380 940 1360 1720 2080 2440 Symbol Description Specifications X10 Non...

Страница 18: ...voltageiondischargedetection Iondischargestopsduringdetection Offset voltage control with the built in sensor maintenance detection incorrect high voltage ion discharge detection stops discharge durin...

Страница 19: ...1 m increments from 1 m to 20 m 11 m or longer power cables are not CE Marking compliant Use standard power supply cables for 3 m and 10 m lengths Made to Order Power supply cable full length IZS CP...

Страница 20: ...tandard model no For IZS40 For IZS41 42 How to Order Model with Made to order transition wiring cable Available in 1 m increments from 1 m to 20 m 11 m or longer power cables are not CE Marking compli...

Страница 21: ...e applicable wire size 2 Insert the cable which was cut into the back of the connector 3 Confirm that the cable is inserted into the back of the connector and press part A with your finger to hold ten...

Страница 22: ...ion discharge NPN specification Stops ion discharge by connecting to 0 V Starts discharging ion when disconnected PNP specification Stops ion discharge by connecting to 24 VDC Starts discharging ion w...

Страница 23: ...detection signal Purple Error signal Internal circuit Shield Ground with a ground resistance of 100 or less Internal circuit 24 V Power supply 24 VDC 0 V 0 V 0 V DC DC F G PLC INPUT INPUT Isolation c...

Страница 24: ...4 5 30 2 x 5 4 18 105 33 Cross sectional view A A Part no n L mm IZS40 340 5 340 IZS40 400 6 400 IZS40 460 7 460 IZS40 580 9 580 IZS40 640 10 640 IZS40 820 13 820 IZS40 1120 18 1120 IZS40 1300 21 1300...

Страница 25: ...tional view A A A A 36 55 35 22 4 5 30 18 2 x 5 4 105 33 Part no n L mm IZS4 340 5 340 IZS4 400 6 400 IZS4 460 7 460 IZS4 580 9 580 IZS4 640 10 640 IZS4 820 13 820 IZS4 1120 18 1120 IZS4 1300 21 1300...

Страница 26: ...4 Amplifier 3500 23 4 8 69 78 11 13 0 5 0 5 6 5 8 8 7 8 10 2 10 2 13 14 8 8 Detection hole 61 7 5 10 5 2 x R 3 3 10 60 7 7 1 6 2 x 3 4 20 98 95 0 2 0 2 Head 1500 4 8 6 6 2 x 3 4 Amplifier 69 78 3500...

Страница 27: ...Nominal cross section 0 2 mm2 Outside diameter 0 66 mm Insulator Outside diameter 1 0 mm Sheath Material Lead free PVC Outside diameter 3 8 mm No of cable wires Size 10 cores AWG20 4 cores AWG28 6 cor...

Страница 28: ...ting brackets may break Also if under tightened with a low torque the connection may loosen Refer to the operation manual for details 6 Do not touch the emitter directly with fingers or metallic tools...

Страница 29: ...scharged from the DC mode ionizer Wiring Piping Warning 1 Before wiring ensure that the power supply capacity is enough and that the voltage is within the specification 2 To maintain product performan...

Страница 30: ...o ISO 8573 1 2010 is recommended for operation 5 Ionizer feedback sensor auto balance sensor remote controller and AC adapter are not resistant to lightening surge 6 Effects on implantable medical dev...

Страница 31: ...the ends of the bar Handling the product by holding either end of the bar may cause damage to the product 3 When mounting dismounting the cable use your finger to pinch the claw of the plug then attac...

Страница 32: ...nction 4 Contact SMC beforehand and take special consideration of safety measures if the product is to be used in any of the following conditions 1 Conditions and environments outside of the given spe...

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