High precision and high resolution
Compound pressure
Repeatability
0.2 %F.S.
1digit or less
Variety of
functions
Variations
Anti-chattering function
Auto shift function
Auto preset function
Key lock function
Peak and bottom display
function
Zero out function
Automatic pressure setting is possible.
Saves time for setting operation.
Special fitting types are used in semiconductor
production equipment (metal gasket seal fittings)
Selectable response times: 2.5ms (default), 24ms,
192ms, 768ms or less
Leak rate: 1 x 10
-10
Pa. m
3
/s
Confirmation of atmospheric pressure of load lock
ZSE/ ISE60(F)-A2
ZSE/ ISE60(F)-B2
1/2000 ( 0.1kPa)
Positive pressure
1/1000 ( 0.001MPa)
Series ZSE60F/ ISE60
URJ 1 / 4
TSJ 1 / 4
Model
Standard thread type
Special fittings for the semiconductor industry
(metal gasket seal fittings)
Port size
Rated pressure range
Output
Switch output
Analog output
Leak rate
1 x 1 0
-5
Pa . m
3
/ s
ZSE50F
ISE50
ZSE60F
ISE60
2
outputs
NPN or PNP
100kPa
-100kPa
0
1MPa
0
100kPa
-100kPa
0
1MPa
0
1 x 1 0
-1 0
Pa
⋅
m
3
/ s
Output voltage
1 to 5V
R 1/ 4
⋅
NPT 1/4
⋅
G 1/ 4 (with M 5 male thread)
URJ 1 /4
⋅
TSJ 1 / 4
Prevents erroneous operation due to sud-
den fluctuations in primary pressure, by all-
owing the response time to be changed.
Pressure detection is not affected by
fluctuations in primary pressure.
Approved
Features 2
ZSE/ISE 4/21/02 1:15 PM Page 3
