Pressure sensor
Fitting
Stainless steel diaphragm
Pressure detection for a wide range of fluids.
Hydraulic fluid (JIS-K2213)
Silicon oil
( JIS-K2213)
Lubricating oil (JIS-K6301 )
Fluoro carbon
Enclosure
Panel mount
Panel mount + Front side protection cover
With bracket
To confirm adsorption of work
pieces containing water
To confirm primary pressure
of cleaning line
To confirm working pressure of
hydraulic cylinder
Application
examples
Option
Using of stainless steel diaphragm
Extremely low leakage
To confirm absorption of work piece with
water on the surface, e.g. wet LCD glass
plate
To measure hydraulic pressure
The stainless steel diaphragm prevents direct
contact between sensor and measured fluid.
Argon
Air containing drain
Ammonia
Freon
Carbon dioxide
Nitrogen
Liquid and gas contact areas
SUS630
Fittings
SUS304
Sensor and fittings are electron-beam welded.
Leakage is kept at the lowest level by using VCR
and Swedgelok
fittings.
ZSE50F / ISE50 1 x 10
-5
Pa
⋅
m
3
/s
ZSE60F / ISE60 1 x 10
-10
Pa
⋅
m
3
/s
IP65
To measure low-quality air,
containing drain
Leakage test with nitrogen
Features 1
Approved
ZSE/ISE 4/21/02 1:14 PM Page 2
